Research graph
References from Effect of DRIE processing on MEMS thermal flow sensor with variable diaphragm dimensions: an experimental study. Local targets link to admitted publications; unresolved targets remain external evidence.
10.3390/s17092061
10.3390/s17092061 · 2017 · External reference
10.1109/5.704271
10.1109/5.704271 · 1998 · External reference
10.1016/j.sna.2026.117770
10.1016/j.sna.2026.117770 · External reference
10.1007/s00542-008-0741-x
10.1007/s00542-008-0741-x · 2008 · External reference
10.1016/j.sna.2013.12.031
10.1016/j.sna.2013.12.031 · 2014 · External reference
Unresolved reference
External reference
Unresolved reference
2018 · External reference
10.1016/j.sna.2017.09.030
10.1016/j.sna.2017.09.030 · 2017 · External reference
10.1109/jsen.2020.2965332
10.1109/jsen.2020.2965332 · 2020 · External reference
Unresolved reference
1989 · External reference
10.1007/s12206-018-0822-4
10.1007/s12206-018-0822-4 · 2018 · External reference
10.1088/1361-6439/ab4aef
10.1088/1361-6439/ab4aef · 2019 · External reference
10.3390/mi14071280
10.3390/mi14071280 · 2023 · External reference
10.1143/jjap.46.7232
10.1143/jjap.46.7232 · 2007 · External reference
Unresolved reference
2024 · External reference
Unresolved reference
External reference
Unresolved reference
2023 · External reference
10.1109/icsens.2014.6985293
10.1109/icsens.2014.6985293 · External reference
10.3390/s19081860
10.3390/s19081860 · 2019 · External reference
10.1016/0925-4005(92)80050-8
10.1016/0925-4005(92)80050-8 · 1992 · External reference
Unresolved reference
1993 · External reference
10.1109/84.825775
10.1109/84.825775 · External reference
10.1088/0960-1317/19/10/105005
10.1088/0960-1317/19/10/105005 · 2009 · External reference
10.1109/ted.2020.2974350
10.1109/ted.2020.2974350 · 2020 · External reference
10.1088/0960-1317/19/12/125029
10.1088/0960-1317/19/12/125029 · 2009 · External reference
Unresolved reference
2021 · External reference
Unresolved reference
2024 · External reference
10.1109/jsen.2024.3498898
10.1109/jsen.2024.3498898 · 2025 · External reference
10.1007/s41683-024-00129-3
10.1007/s41683-024-00129-3 · 2024 · External reference
10.1109/jmems.2017.2707558
10.1109/jmems.2017.2707558 · 2017 · External reference
Unresolved reference
2001 · External reference
10.3390/mi14040846
10.3390/mi14040846 · 2023 · External reference
10.1007/s00542-008-0741-x
10.1007/s00542-008-0741-x · ExternalCitation · doi-reference
10.1007/s12206-018-0822-4
10.1007/s12206-018-0822-4 · ExternalCitation · doi-reference
10.1007/s41683-024-00129-3
10.1007/s41683-024-00129-3 · ExternalCitation · doi-reference
10.1016/0925-4005(92)80050-8
10.1016/0925-4005(92)80050-8 · ExternalCitation · doi-reference
10.1016/j.sna.2013.12.031
10.1016/j.sna.2013.12.031 · ExternalCitation · doi-reference
10.1016/j.sna.2017.09.030
10.1016/j.sna.2017.09.030 · ExternalCitation · doi-reference
10.1016/j.sna.2026.117770
10.1016/j.sna.2026.117770 · ExternalCitation · doi-reference
10.1088/0960-1317/19/10/105005
10.1088/0960-1317/19/10/105005 · ExternalCitation · doi-reference
10.1088/0960-1317/19/12/125029
10.1088/0960-1317/19/12/125029 · ExternalCitation · doi-reference
10.1088/1361-6439/ab4aef
10.1088/1361-6439/ab4aef · ExternalCitation · doi-reference
10.1109/5.704271
10.1109/5.704271 · ExternalCitation · doi-reference
10.1109/84.825775
10.1109/84.825775 · ExternalCitation · doi-reference
10.1109/icsens.2014.6985293
10.1109/icsens.2014.6985293 · ExternalCitation · doi-reference
10.1109/jmems.2017.2707558
10.1109/jmems.2017.2707558 · ExternalCitation · doi-reference
10.1109/jsen.2020.2965332
10.1109/jsen.2020.2965332 · ExternalCitation · doi-reference
10.1109/jsen.2024.3498898
10.1109/jsen.2024.3498898 · ExternalCitation · doi-reference
10.1109/ted.2020.2974350
10.1109/ted.2020.2974350 · ExternalCitation · doi-reference
10.1143/jjap.46.7232
10.1143/jjap.46.7232 · ExternalCitation · doi-reference
10.3390/mi14040846
10.3390/mi14040846 · ExternalCitation · doi-reference
10.3390/mi14071280
10.3390/mi14071280 · ExternalCitation · doi-reference
10.3390/s17092061
10.3390/s17092061 · ExternalCitation · doi-reference
10.3390/s19081860
10.3390/s19081860 · ExternalCitation · doi-reference
