Research graph
References from Integrated design of MEMS: aiming at manufacturability. Local targets link to admitted publications; unresolved targets remain external evidence.
Unresolved reference
External reference
Unresolved reference
External reference
10.1088/0960-1317/15/1/021
10.1088/0960-1317/15/1/021 · 2004 · External reference
10.1088/0960-1317/14/3/005
10.1088/0960-1317/14/3/005 · 2003 · External reference
Unresolved reference
2004 · External reference
Unresolved reference
External reference
10.1109/isqed.2005.66
10.1109/isqed.2005.66 · External reference
10.1117/12.544971
10.1117/12.544971 · External reference
10.1088/0960-1317/13/5/301
10.1088/0960-1317/13/5/301 · 2003 · External reference
Unresolved reference
External reference
Unresolved reference
2000 · External reference
