Research graph
References from Space–Time Coupled Finite Element Simulation of PECVD Reactor. Local targets link to admitted publications; unresolved targets remain external evidence.
10.1063/1.366016
10.1063/1.366016 · 1997 · External reference
10.1143/jjap.45.8172
10.1143/jjap.45.8172 · 2006 · External reference
10.1103/physreve.70.056407
10.1103/physreve.70.056407 · 2004 · External reference
10.1002/cvde.200606554
10.1002/cvde.200606554 · 2007 · External reference
10.1088/0022-3727/36/15/313
10.1088/0022-3727/36/15/313 · 2003 · External reference
10.1063/1.1578522
10.1063/1.1578522 · 2003 · External reference
10.1016/j.msea.2006.07.015
10.1016/j.msea.2006.07.015 · 2006 · External reference
10.1134/1.1259574
10.1134/1.1259574 · 2000 · External reference
Unresolved reference
External reference
10.1088/0963-0252/3/3/007
10.1088/0963-0252/3/3/007 · 1994 · External reference
