Research graph
References from Performance analysis of automated interbay material-handling and storage systems for large Wafer Fab. Local targets link to admitted publications; unresolved targets remain external evidence.
Prospects of the automation for ULSI manufacturing
1990 · External reference
Simulation tool for design and management optimization of automated interbay material handling and storage systems for large Wafer Fab
10.1109/66.350756 · 1995 · External reference
Performances analyses for intrabay material handling automation in MOS memory production
1993 · External reference
Factory automation of front-end processing for VLSI fabrication
1988 · External reference
The future of automation for high volume wafer fabrication and ASIC manufacturing
1986 · External reference
Automated transport system in IC facility
1990 · External reference
Top Fabs of 1992
1992 · External reference
Unresolved reference
1990 · External reference
Material handling automation for wafer fabrication facility
1990 · External reference
Unresolved reference
1993 · External reference
