Research graph
References from Silicon microstructuring technology. Local targets link to admitted publications; unresolved targets remain external evidence.
Unresolved reference
1982 · External reference
10.1149/1.2086277
10.1149/1.2086277 · 1990 · External reference
Unresolved reference
1991 · External reference
Unresolved reference
1995 · External reference
10.1116/1.584158
10.1116/1.584158 · 1988 · External reference
10.1016/0250-6874(89)87109-4
10.1016/0250-6874(89)87109-4 · 1989 · External reference
10.1016/0924-4247(94)00815-9
10.1016/0924-4247(94)00815-9 · 1994 · External reference
10.1063/1.350839
10.1063/1.350839 · 1992 · External reference
Unresolved reference
1991 · External reference
Unresolved reference
1992 · External reference
Unresolved reference
1991 · External reference
Unresolved reference
1991 · External reference
Unresolved reference
1993 · External reference
10.1016/0924-4247(94)80129-0
10.1016/0924-4247(94)80129-0 · 1994 · External reference
10.1016/0924-4247(91)80017-j
10.1016/0924-4247(91)80017-j · 1991 · External reference
Unresolved reference
1994 · External reference
Unresolved reference
1991 · External reference
Unresolved reference
1993 · External reference
10.1016/0924-4247(90)85027-2
10.1016/0924-4247(90)85027-2 · 1990 · External reference
Unresolved reference
1991 · External reference
Unresolved reference
1991 · External reference
Unresolved reference
1987 · External reference
Unresolved reference
1988 · External reference
Unresolved reference
1991 · External reference
Unresolved reference
1995 · External reference
10.1016/0022-0248(92)90619-t
10.1016/0022-0248(92)90619-t · 1992 · External reference
10.1149/1.2220767
10.1149/1.2220767 · 1993 · External reference
Unresolved reference
1967 · External reference
10.1016/0924-4247(94)00820-5
10.1016/0924-4247(94)00820-5 · 1994 · External reference
Unresolved reference
1990 · External reference
10.1016/0924-4247(91)80009-e
10.1016/0924-4247(91)80009-e · 1991 · External reference
10.1088/0960-1317/3/3/004
10.1088/0960-1317/3/3/004 · 1993 · External reference
Unresolved reference
1995 · External reference
Unresolved reference
1995 · External reference
Unresolved reference
1985 · External reference
Unresolved reference
1987 · External reference
Unresolved reference
1992 · External reference
Unresolved reference
1994 · External reference
10.1063/1.102841
10.1063/1.102841 · 1990 · External reference
10.1116/1.569958
10.1116/1.569958 · 1979 · External reference
Unresolved reference
1991 · External reference
10.1109/sensor.1995.721742
10.1109/sensor.1995.721742 · 1995 · External reference
10.1088/0960-1317/2/4/006
10.1088/0960-1317/2/4/006 · 1992 · External reference
Unresolved reference
1993 · External reference
Unresolved reference
1993 · External reference
Unresolved reference
1992 · External reference
Unresolved reference
1992 · External reference
10.1109/16.2534
10.1109/16.2534 · 1988 · External reference
Unresolved reference
1994 · External reference
Unresolved reference
1993 · External reference
Unresolved reference
1991 · External reference
Unresolved reference
1991 · External reference
10.1109/sensor.1995.717148
10.1109/sensor.1995.717148 · 1995 · External reference
Unresolved reference
1990 · External reference
Unresolved reference
1989 · External reference
10.1016/0924-4247(90)85001-k
10.1016/0924-4247(90)85001-k · 1990 · External reference
Unresolved reference
1993 · External reference
Unresolved reference
1994 · External reference
Unresolved reference
1993 · External reference
10.1109/sensor.1995.721913
10.1109/sensor.1995.721913 · 1995 · External reference
Unresolved reference
1993 · External reference
Unresolved reference
1988 · External reference
Unresolved reference
1991 · External reference
10.1109/sensor.1995.721898
10.1109/sensor.1995.721898 · 1995 · External reference
10.1149/1.2085575
10.1149/1.2085575 · 1991 · External reference
10.1063/1.104512
10.1063/1.104512 · 1991 · External reference
10.1149/1.2220919
10.1149/1.2220919 · 1993 · External reference
Unresolved reference
1996 · External reference
10.1063/1.103561
10.1063/1.103561 · 1990 · External reference
10.1109/55.116957
10.1109/55.116957 · 1991 · External reference
Unresolved reference
1995 · External reference
10.1088/0960-1317/3/1/007
10.1088/0960-1317/3/1/007 · 1993 · External reference
10.1143/jjap.33.6075
10.1143/jjap.33.6075 · 1994 · External reference
10.1016/0040-6090(94)05604-c
10.1016/0040-6090(94)05604-c · 1995 · External reference
Unresolved reference
External reference
10.1063/1.351979
10.1063/1.351979 · 1992 · External reference
Unresolved reference
1987 · External reference
10.1109/t-ed.1987.23335
10.1109/t-ed.1987.23335 · 1987 · External reference
10.1016/0040-6090(95)91137-b
10.1016/0040-6090(95)91137-b · 1995 · External reference
Unresolved reference
1991 · External reference
10.1016/0924-4247(93)00655-n
10.1016/0924-4247(93)00655-n · 1994 · External reference
10.1016/0924-4247(93)00691-v
10.1016/0924-4247(93)00691-v · 1994 · External reference
