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References from New contactless method to control the O/N ratio in SiON films. Local targets link to admitted publications; unresolved targets remain external evidence.
10.1016/s0040-6090(96)09333-9
10.1016/s0040-6090(96)09333-9 · 1997 · External reference
10.1109/55.678546
10.1109/55.678546 · 1998 · External reference
10.1109/16.661229
10.1109/16.661229 · 1998 · External reference
10.1103/physrevb.59.9229
10.1103/physrevb.59.9229 · 1999 · External reference
10.1063/1.476700
10.1063/1.476700 · 1998 · External reference
10.1063/1.369402
10.1063/1.369402 · 1999 · External reference
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10.1103/physrevb.17.3984
10.1103/physrevb.17.3984 · 1978 · External reference
10.1016/s0022-3093(97)00058-6
10.1016/s0022-3093(97)00058-6 · 1997 · External reference