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References from Plasma immersion ion implantation—a fledgling technique for semiconductor processing. Local targets link to admitted publications; unresolved targets remain external evidence.
10.1063/1.339055
10.1063/1.339055 · 1987 · External reference
10.1063/1.100299
10.1063/1.100299 · 1988 · External reference
10.1116/1.587327
10.1116/1.587327 · 1994 · External reference
10.1116/1.587330
10.1116/1.587330 · 1994 · External reference
10.1116/1.587332
10.1116/1.587332 · 1994 · External reference
10.1116/1.587329
10.1116/1.587329 · 1994 · External reference
10.1116/1.587333
10.1116/1.587333 · 1994 · External reference
10.1016/0257-8972(95)08370-7
10.1016/0257-8972(95)08370-7 · 1995 · External reference
10.1063/1.358516
10.1063/1.358516 · 1994 · External reference
10.1016/0168-583x(91)96285-s
10.1016/0168-583x(91)96285-s · 1991 · External reference
10.1063/1.106392
10.1063/1.106392 · 1991 · External reference
Unresolved reference
1991 · External reference
10.1016/0168-583x(91)96286-t
10.1016/0168-583x(91)96286-t · 1991 · External reference
10.1007/bf02670923
10.1007/bf02670923 · 1992 · External reference
Unresolved reference
1992 · External reference
10.1109/55.244712
10.1109/55.244712 · 1993 · External reference
10.1557/proc-279-255
10.1557/proc-279-255 · 1992 · External reference
10.1116/1.587334
10.1116/1.587334 · 1994 · External reference
10.1116/1.587335
10.1116/1.587335 · 1994 · External reference
10.1116/1.587336
10.1116/1.587336 · 1994 · External reference
Unresolved reference
1993 · External reference
10.1109/55.286690
10.1109/55.286690 · 1994 · External reference
Unresolved reference
1995 · External reference
10.1116/1.587337
10.1116/1.587337 · 1994 · External reference
Unresolved reference
1993 · External reference
10.1016/0254-0584(95)01474-8
10.1016/0254-0584(95)01474-8 · 1995 · External reference
Unresolved reference
1995 · External reference
10.1016/0257-8972(96)02885-x
10.1016/0257-8972(96)02885-x · 1996 · External reference
10.1063/1.114345
10.1063/1.114345 · 1995 · External reference
Unresolved reference
1994 · External reference
Unresolved reference
1994 · External reference
10.1557/proc-354-117
10.1557/proc-354-117 · 1994 · External reference
Unresolved reference
1995 · External reference
Unresolved reference
1995 · External reference
Unresolved reference
1995 · External reference
10.1109/55.464804
10.1109/55.464804 · 1995 · External reference
10.1109/55.286690
10.1109/55.286690 · 1994 · External reference
Unresolved reference
1992 · External reference
10.1016/0168-583x(91)96303-3
10.1016/0168-583x(91)96303-3 · 1991 · External reference
10.1016/0168-583x(91)96301-z
10.1016/0168-583x(91)96301-z · 1991 · External reference
10.1016/0168-583x(91)96302-2
10.1016/0168-583x(91)96302-2 · 1991 · External reference
Unresolved reference
1991 · External reference
Unresolved reference
1991 · External reference
Unresolved reference
1992 · External reference
10.1063/1.106871
10.1063/1.106871 · 1992 · External reference
Unresolved reference
1991 · External reference
10.1116/1.587357
10.1116/1.587357 · 1994 · External reference
10.1116/1.587358
10.1116/1.587358 · 1994 · External reference
10.1116/1.587361
10.1116/1.587361 · 1994 · External reference
10.1016/0168-583x(95)00228-6
10.1016/0168-583x(95)00228-6 · 1995 · External reference
Unresolved reference
1995 · External reference
Unresolved reference
External reference
10.1016/0168-583x(91)96300-a
10.1016/0168-583x(91)96300-a · 1991 · External reference
10.1063/1.338333
10.1063/1.338333 · 1987 · External reference
10.1016/0168-583x(93)95013-u
10.1016/0168-583x(93)95013-u · 1993 · External reference
10.1149/1.2069169
10.1149/1.2069169 · 1992 · External reference
10.1063/1.103097
10.1063/1.103097 · 1990 · External reference
10.1063/1.103180
10.1063/1.103180 · 1990 · External reference
10.1143/jjap.32.4404
10.1143/jjap.32.4404 · 1993 · External reference
10.1149/1.2054928
10.1149/1.2054928 · 1994 · External reference
10.1063/1.344553
10.1063/1.344553 · 1990 · External reference
Unresolved reference
1993 · External reference
Unresolved reference
1994 · External reference
Unresolved reference
1994 · External reference
Unresolved reference
1985 · External reference
10.1088/0963-0252/1/1/001
10.1088/0963-0252/1/1/001 · 1992 · External reference
10.1016/0168-583x(95)00779-2
10.1016/0168-583x(95)00779-2 · 1995 · External reference
10.1007/bf02666628
10.1007/bf02666628 · 1996 · External reference
Unresolved reference
1995 · External reference
10.1116/1.579418
10.1116/1.579418 · 1995 · External reference
10.1109/27.125051
10.1109/27.125051 · 1991 · External reference
10.1109/27.163596
10.1109/27.163596 · 1992 · External reference
10.1063/1.344172
10.1063/1.344172 · 1989 · External reference
10.1063/1.345722
10.1063/1.345722 · 1990 · External reference
10.1063/1.349240
10.1063/1.349240 · 1991 · External reference
10.1007/bf02670644
10.1007/bf02670644 · 1994 · External reference
Semiconductor Devices Physics and Technology
1985 · External reference
Semiconductor Devices Physics and Technology
1985 · External reference
Unresolved reference
1991 · External reference
Silicon-on-Insulator Technology: Materials to VLSI
10.1007/978-1-4757-2121-8 · 1991 · External reference
Unresolved reference
1992 · External reference
10.1016/0168-583x(87)90833-0
10.1016/0168-583x(87)90833-0 · 1987 · External reference
10.1016/0921-5107(92)90275-e
10.1016/0921-5107(92)90275-e · 1992 · External reference
10.1016/0168-583x(91)96229-e
10.1016/0168-583x(91)96229-e · 1991 · External reference
10.1109/edl.1980.25272
10.1109/edl.1980.25272 · 1980 · External reference
10.1109/55.75757
10.1109/55.75757 · 1991 · External reference
10.1149/1.2085426
10.1149/1.2085426 · 1991 · External reference
Unresolved reference
1988 · External reference
10.1063/1.102543
10.1063/1.102543 · 1990 · External reference
10.1143/jjap.32.2601
10.1143/jjap.32.2601 · 1993 · External reference
Unresolved reference
1995 · External reference
10.1063/1.353841
10.1063/1.353841 · 1993 · External reference
Unresolved reference
1985 · External reference
10.1109/16.52441
10.1109/16.52441 · 1990 · External reference
10.1063/1.100318
10.1063/1.100318 · 1988 · External reference
10.1016/0168-583x(87)90522-2
10.1016/0168-583x(87)90522-2 · 1987 · External reference
Unresolved reference
1994 · External reference
10.1103/physrevb.50.2458
10.1103/physrevb.50.2458 · 1994 · External reference
10.1063/1.113228
10.1063/1.113228 · 1995 · External reference
Unresolved reference
External reference
Unresolved reference
1994 · External reference
10.1063/1.113246
10.1063/1.113246 · 1995 · External reference
10.1063/1.114647
10.1063/1.114647 · 1995 · External reference
10.1063/1.339858
10.1063/1.339858 · 1987 · External reference
10.1063/1.348600
10.1063/1.348600 · 1991 · External reference
10.1063/1.1692823
10.1063/1.1692823 · 1970 · External reference
Unresolved reference
1970 · External reference
10.1063/1.350740
10.1063/1.350740 · 1992 · External reference
10.1143/jjap.31.2570
10.1143/jjap.31.2570 · 1992 · External reference
10.1063/1.353841
10.1063/1.353841 · 1993 · External reference
Unresolved reference
External reference
Glow Discharge Processes
1980 · External reference
10.1109/27.16552
10.1109/27.16552 · 1988 · External reference
Unresolved reference
External reference
Unresolved reference
1988 · External reference
10.1063/1.342600
10.1063/1.342600 · 1989 · External reference
10.1116/1.587324
10.1116/1.587324 · 1994 · External reference
10.1063/1.360640
10.1063/1.360640 · 1995 · External reference
10.1109/27.106800
10.1109/27.106800 · 1991 · External reference
Unresolved reference
External reference
Unresolved reference
External reference
Unresolved reference
1996 · External reference
Unresolved reference
1986 · External reference
The Stopping and Range of Ions in Solids
1985 · External reference
10.1116/1.587364
10.1116/1.587364 · 1994 · External reference
10.1016/0257-8972(96)02882-4
10.1016/0257-8972(96)02882-4 · 1996 · External reference
10.1116/1.588121
10.1116/1.588121 · 1995 · External reference
Unresolved reference
External reference
10.1116/1.588122
10.1116/1.588122 · 1995 · External reference
10.1116/1.579418
10.1116/1.579418 · 1995 · External reference
10.1109/tps.1978.4317141
10.1109/tps.1978.4317141 · 1978 · External reference
10.1063/1.1139728
10.1063/1.1139728 · 1988 · External reference
10.1016/0375-9601(67)90480-x
10.1016/0375-9601(67)90480-x · 1967 · External reference
Introduction to Plasma Physics and Controlled Fusion, Vol. 1: Plasma Physics
1984 · External reference
Introduction to Plasma Physics and Controlled Fusion, Vol. 1: Plasma Physics
1984 · External reference
10.1143/jjap.23.237
10.1143/jjap.23.237 · 1984 · External reference
Unresolved reference
1982 · External reference
Unresolved reference
1992 · External reference
10.1016/0038-1101(95)00085-8
10.1016/0038-1101(95)00085-8 · 1996 · External reference
Unresolved reference
1996 · External reference
Unresolved reference
1980 · External reference
Unresolved reference
1994 · External reference
Unresolved reference
1987 · External reference
