Research graph
References from Multilevel interconnections for ULSI and GSI era. Local targets link to admitted publications; unresolved targets remain external evidence.
Unresolved reference
External reference
10.1109/edl.1982.25491
10.1109/edl.1982.25491 · External reference
10.1109/t-ed.1982.20757
10.1109/t-ed.1982.20757 · External reference
10.1109/iedm.1979.189654
10.1109/iedm.1979.189654 · External reference
10.1016/b978-0-08-057056-3.50012-4
10.1016/b978-0-08-057056-3.50012-4 · External reference
10.1147/rd.394.0371
10.1147/rd.394.0371 · External reference
Unresolved reference
External reference
10.1557/proc-337-13
10.1557/proc-337-13 · External reference
10.1557/proc-337-25
10.1557/proc-337-25 · External reference
10.1109/edl.1982.25610
10.1109/edl.1982.25610 · External reference
10.1109/t-ed.1983.21093
10.1109/t-ed.1983.21093 · External reference
10.1109/jssc.1983.1051966
10.1109/jssc.1983.1051966 · External reference
10.1109/jssc.1983.1051966
10.1109/jssc.1983.1051966 · External reference
Unresolved reference
External reference
10.1109/31.45685
10.1109/31.45685 · External reference
10.1109/iccd.1992.276256
10.1109/iccd.1992.276256 · External reference
10.1109/101.340307
10.1109/101.340307 · External reference
Unresolved reference
External reference
10.1109/iedm.1995.499187
10.1109/iedm.1995.499187 · External reference
10.1109/iedm.1995.499188
10.1109/iedm.1995.499188 · External reference
10.1109/iedm.1990.237227
10.1109/iedm.1990.237227 · External reference
Unresolved reference
External reference
Unresolved reference
External reference
Unresolved reference
External reference
10.1016/0038-1101(95)00093-9
10.1016/0038-1101(95)00093-9 · External reference
10.1080/10408439508243732
10.1080/10408439508243732 · External reference
Unresolved reference
External reference
Unresolved reference
External reference
10.1149/1.2085434
10.1149/1.2085434 · External reference
Unresolved reference
External reference
Unresolved reference
External reference
10.1116/1.588004
10.1116/1.588004 · External reference
10.1143/jjap.33.424
10.1143/jjap.33.424 · External reference
10.1149/1.2108827
10.1149/1.2108827 · External reference
Unresolved reference
External reference
Unresolved reference
External reference
Unresolved reference
External reference
10.1149/1.2059362
10.1149/1.2059362 · External reference
Unresolved reference
External reference
10.1116/1.578677
10.1116/1.578677 · External reference
10.1007/bf02666406
10.1007/bf02666406 · External reference
Unresolved reference
External reference
10.1103/physrevb.1.1382
10.1103/physrevb.1.1382 · External reference
10.1088/0953-8984/5/5/007
10.1088/0953-8984/5/5/007 · External reference
Unresolved reference
External reference
10.1016/s0080-8784(08)62860-4
10.1016/s0080-8784(08)62860-4 · External reference
10.1109/iedm.1993.347355
10.1109/iedm.1993.347355 · External reference
10.1063/1.108287
10.1063/1.108287 · External reference
10.1063/1.342808
10.1063/1.342808 · External reference
10.1149/1.2220837
10.1149/1.2220837 · External reference
Unresolved reference
External reference
Unresolved reference
External reference
Unresolved reference
External reference
10.1063/1.113907
10.1063/1.113907 · External reference
10.1557/jmr.1991.1498
10.1557/jmr.1991.1498 · External reference
Unresolved reference
External reference
Unresolved reference
External reference
10.1557/proc-239-99
10.1557/proc-239-99 · External reference
Unresolved reference
External reference
10.1557/proc-308-297
10.1557/proc-308-297 · External reference
10.1557/proc-260-929
10.1557/proc-260-929 · External reference
Unresolved reference
External reference
10.1557/proc-338-289
10.1557/proc-338-289 · External reference
10.1116/1.584172
10.1116/1.584172 · External reference
Unresolved reference
External reference
Unresolved reference
External reference
10.1149/1.2085721
10.1149/1.2085721 · External reference
10.1063/1.99542
10.1063/1.99542 · External reference
10.7567/ssdm.1989.a-1-4
10.7567/ssdm.1989.a-1-4 · External reference
10.1063/1.103024
10.1063/1.103024 · External reference
10.1557/proc-27-501
10.1557/proc-27-501 · External reference
10.1016/0254-0584(95)01514-0
10.1016/0254-0584(95)01514-0 · External reference
10.1115/1.3226524
10.1115/1.3226524 · External reference
10.1007/978-1-4613-1069-3
10.1007/978-1-4613-1069-3 · External reference
10.1016/0040-6090(78)90184-0
10.1016/0040-6090(78)90184-0 · External reference
10.1557/s0883769400047710
10.1557/s0883769400047710 · External reference
10.1016/0920-2307(92)90011-o
10.1016/0920-2307(92)90011-o · External reference
10.1557/proc-318-451
10.1557/proc-318-451 · External reference
10.1109/iedm.1995.499187
10.1109/iedm.1995.499187 · External reference
Unresolved reference
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Unresolved reference
External reference
Unresolved reference
External reference
Unresolved reference
External reference
Unresolved reference
External reference
10.1007/bf02642856
10.1007/bf02642856 · External reference
Unresolved reference
External reference
10.1109/iedm.1991.235449
10.1109/iedm.1991.235449 · External reference
Unresolved reference
External reference
10.1063/1.111408
10.1063/1.111408 · External reference
10.1109/iedm.1995.499190
10.1109/iedm.1995.499190 · External reference
10.1557/proc-427-193
10.1557/proc-427-193 · External reference
Unresolved reference
External reference
10.1557/proc-260-929
10.1557/proc-260-929 · External reference
10.1557/proc-318-319
10.1557/proc-318-319 · External reference
Unresolved reference
External reference
10.1063/1.357231
10.1063/1.357231 · External reference
Unresolved reference
External reference
10.1149/1.2056143
10.1149/1.2056143 · External reference
10.1557/proc-381-267
10.1557/proc-381-267 · External reference
10.1109/33.206913
10.1109/33.206913 · External reference
Unresolved reference
External reference
Unresolved reference
External reference
10.1557/proc-381-3
10.1557/proc-381-3 · External reference
10.1557/proc-381-79
10.1557/proc-381-79 · External reference
10.1557/proc-381-261
10.1557/proc-381-261 · External reference
Unresolved reference
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Unresolved reference
External reference
Unresolved reference
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Unresolved reference
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Unresolved reference
External reference
10.1116/1.569519
10.1116/1.569519 · External reference
10.1149/1.2408101
10.1149/1.2408101 · External reference
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Unresolved reference
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Unresolved reference
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Unresolved reference
External reference
Unresolved reference
External reference
10.1116/1.574977
10.1116/1.574977 · External reference
10.1557/proc-27-501
10.1557/proc-27-501 · External reference
10.1557/proc-427-185
10.1557/proc-427-185 · External reference
10.1557/s0883769400047291
10.1557/s0883769400047291 · External reference
10.1557/s0883769400047722
10.1557/s0883769400047722 · External reference
10.1021/cm00012a007
10.1021/cm00012a007 · External reference
10.1021/cm00009a002
10.1021/cm00009a002 · External reference
10.1109/vmic.1991.152975
10.1109/vmic.1991.152975 · External reference
10.1063/1.110304
10.1063/1.110304 · External reference
Unresolved reference
External reference
10.1063/1.108101
10.1063/1.108101 · External reference
10.1016/0921-5107(94)90277-1
10.1016/0921-5107(94)90277-1 · External reference
10.1557/s0883769400047734
10.1557/s0883769400047734 · External reference
10.1063/1.108286
10.1063/1.108286 · External reference
10.1109/iedm.1995.499385
10.1109/iedm.1995.499385 · External reference
Unresolved reference
External reference
Unresolved reference
External reference
10.1149/1.2096602
10.1149/1.2096602 · External reference
Unresolved reference
External reference
Unresolved reference
External reference
Unresolved reference
External reference
Unresolved reference
External reference
10.1557/s0883769400045541
10.1557/s0883769400045541 · External reference
Unresolved reference
External reference
10.1557/s0883769400047308
10.1557/s0883769400047308 · External reference
10.1557/s0883769400047758
10.1557/s0883769400047758 · External reference
10.1088/0960-1317/1/1/012
10.1088/0960-1317/1/1/012 · External reference
Unresolved reference
External reference
10.1557/proc-381-45
10.1557/proc-381-45 · External reference
10.1557/proc-381-249
10.1557/proc-381-249 · External reference
10.1557/proc-381-105
10.1557/proc-381-105 · External reference
10.1149/1.2120092
10.1149/1.2120092 · External reference
10.1063/1.106299
10.1063/1.106299 · External reference
10.1557/proc-201-129
10.1557/proc-201-129 · External reference
10.1557/proc-260-777
10.1557/proc-260-777 · External reference
Unresolved reference
External reference
10.1143/jjap.32.3013
10.1143/jjap.32.3013 · External reference
10.1557/s0883769400047771
10.1557/s0883769400047771 · External reference
10.1557/s088376940004731x
10.1557/s088376940004731x · External reference
10.1557/s0883769400047321
10.1557/s0883769400047321 · External reference
10.1149/1.2085434
10.1149/1.2085434 · External reference
Unresolved reference
External reference
Unresolved reference
External reference
10.1149/1.2059241
10.1149/1.2059241 · External reference
Unresolved reference
External reference
10.1016/0254-0584(95)01516-7
10.1016/0254-0584(95)01516-7 · External reference
Unresolved reference
External reference
Unresolved reference
External reference
10.1109/iedm.1993.347356
10.1109/iedm.1993.347356 · External reference
10.1109/iedm.1993.347355
10.1109/iedm.1993.347355 · External reference
10.1109/iedm.1993.347353
10.1109/iedm.1993.347353 · External reference
Unresolved reference
External reference
10.1109/iedm.1994.383455
10.1109/iedm.1994.383455 · External reference
10.1016/b978-0-12-522660-8.50011-8
10.1016/b978-0-12-522660-8.50011-8 · External reference
Unresolved reference
External reference
10.1109/55.215183
10.1109/55.215183 · External reference
10.1149/1.2056211
10.1149/1.2056211 · External reference
Unresolved reference
External reference
10.1109/55.192790
10.1109/55.192790 · External reference
Unresolved reference
External reference
10.1557/proc-265-187
10.1557/proc-265-187 · External reference
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Unresolved reference
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10.1063/1.359851
10.1063/1.359851 · External reference
10.1016/0040-6090(93)90385-3
10.1016/0040-6090(93)90385-3 · External reference
Unresolved reference
External reference
10.1063/1.112866
10.1063/1.112866 · External reference
10.1557/jmr.1992.1133
10.1557/jmr.1992.1133 · External reference
Unresolved reference
External reference
Unresolved reference
External reference
10.1109/5.34127
10.1109/5.34127 · External reference
10.1557/proc-381-267
10.1557/proc-381-267 · External reference
Unresolved reference
External reference
10.7567/ssdm.1982.a-1-1
10.7567/ssdm.1982.a-1-1 · External reference
Unresolved reference
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Unresolved reference
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