Research graph
References from Low dielectric constant materials and methods for interlayer dielectric films in ultralarge-scale integrated circuit multilevel interconnections. Local targets link to admitted publications; unresolved targets remain external evidence.
10.1149/1.2087093
10.1149/1.2087093 · 1990 · External reference
10.1149/1.2221277
10.1149/1.2221277 · 1992 · External reference
10.1109/vmic.1991.153049
10.1109/vmic.1991.153049 · External reference
10.1149/1.2100297
10.1149/1.2100297 · 1987 · External reference
10.1149/1.2119902
10.1149/1.2119902 · 1983 · External reference
Unresolved reference
External reference
10.1149/1.2220761
10.1149/1.2220761 · 1993 · External reference
10.1149/1.2056143
10.1149/1.2056143 · 1993 · External reference
10.1149/1.2221132
10.1149/1.2221132 · 1993 · External reference
10.1149/1.2220834
10.1149/1.2220834 · 1993 · External reference
10.1016/0040-6090(94)90079-5
10.1016/0040-6090(94)90079-5 · 1994 · External reference
10.1016/0040-6090(93)90247-m
10.1016/0040-6090(93)90247-m · 1993 · External reference
Unresolved reference
External reference
Unresolved reference
External reference
Unresolved reference
External reference
10.1143/jjap.33.408
10.1143/jjap.33.408 · 1994 · External reference
Unresolved reference
External reference
Unresolved reference
External reference
10.1016/0040-6090(95)08116-x
10.1016/0040-6090(95)08116-x · 1996 · External reference
10.1116/1.577227
10.1116/1.577227 · 1991 · External reference
10.1149/1.2086634
10.1149/1.2086634 · 1990 · External reference
10.1116/1.585009
10.1116/1.585009 · 1990 · External reference
10.1149/1.2086361
10.1149/1.2086361 · 1990 · External reference
10.1149/1.2097334
10.1149/1.2097334 · 1989 · External reference
10.1149/1.2086191
10.1149/1.2086191 · 1990 · External reference
10.1149/1.2085690
10.1149/1.2085690 · 1991 · External reference
10.1149/1.2086360
10.1149/1.2086360 · 1990 · External reference
10.1109/irps.1990.363524
10.1109/irps.1990.363524 · External reference
10.1116/1.583942
10.1116/1.583942 · 1987 · External reference
10.1016/0040-6090(81)90661-1
10.1016/0040-6090(81)90661-1 · 1981 · External reference
10.1109/tphp.1973.1136727
10.1109/tphp.1973.1136727 · 1973 · External reference
10.1147/rd.286.0735
10.1147/rd.286.0735 · 1984 · External reference
10.1109/t-ed.1987.22972
10.1109/t-ed.1987.22972 · 1987 · External reference
Unresolved reference
External reference
Unresolved reference
1984 · External reference
10.1149/1.2096198
10.1149/1.2096198 · 1988 · External reference
10.1557/proc-105-283
10.1557/proc-105-283 · 1988 · External reference
10.1557/proc-381-261
10.1557/proc-381-261 · 1995 · External reference
10.1557/proc-381-267
10.1557/proc-381-267 · 1995 · External reference
Unresolved reference
External reference
10.1109/vlsit.1996.507801
10.1109/vlsit.1996.507801 · External reference
Unresolved reference
External reference
10.1109/vmic.1990.127862
10.1109/vmic.1990.127862 · External reference
10.1109/vmic.1990.127905
10.1109/vmic.1990.127905 · External reference
10.1149/1.2221131
10.1149/1.2221131 · 1993 · External reference
10.1109/vmic.1991.152991
10.1109/vmic.1991.152991 · External reference
10.1007/bf02655550
10.1007/bf02655550 · 1990 · External reference
10.1143/jjap.30.1530
10.1143/jjap.30.1530 · 1991 · External reference
10.1109/iedm.1989.74368
10.1109/iedm.1989.74368 · External reference
10.1109/vmic.1991.153050
10.1109/vmic.1991.153050 · External reference
10.1109/t-ed.1981.20287
10.1109/t-ed.1981.20287 · 1981 · External reference
10.1109/55.75737
10.1109/55.75737 · 1991 · External reference
10.1116/1.583944
10.1116/1.583944 · 1987 · External reference
10.1109/16.8795
10.1109/16.8795 · 1988 · External reference
10.1109/55.46912
10.1109/55.46912 · 1990 · External reference
10.1116/1.577580
10.1116/1.577580 · 1991 · External reference
Unresolved reference
1992 · External reference
10.1109/vlsit.1991.705964
10.1109/vlsit.1991.705964 · External reference
10.1063/1.350733
10.1063/1.350733 · 1992 · External reference
10.1109/vmic.1989.78025
10.1109/vmic.1989.78025 · External reference
10.1109/vmic.1988.14183
10.1109/vmic.1988.14183 · External reference
10.1109/vmic.1989.78015
10.1109/vmic.1989.78015 · External reference
10.1109/vmic.1989.78013
10.1109/vmic.1989.78013 · External reference
10.1109/vmic.1991.153014
10.1109/vmic.1991.153014 · External reference
10.1149/1.2127434
10.1149/1.2127434 · 1981 · External reference
Unresolved reference
External reference
10.1116/1.577393
10.1116/1.577393 · 1991 · External reference
Unresolved reference
1988 · External reference
10.1109/edl.1985.26240
10.1109/edl.1985.26240 · 1985 · External reference
Unresolved reference
External reference
10.1116/1.583518
10.1116/1.583518 · 1986 · External reference
10.1109/iedm.1989.74367
10.1109/iedm.1989.74367 · External reference
10.1143/jjap.25.l24
10.1143/jjap.25.l24 · 1986 · External reference
10.1149/1.2085872
10.1149/1.2085872 · 1991 · External reference
Unresolved reference
1993 · External reference
10.1109/vlsit.1994.324378
10.1109/vlsit.1994.324378 · External reference
10.1109/16.249433
10.1109/16.249433 · 1993 · External reference
10.1149/1.1836505
10.1149/1.1836505 · 1996 · External reference
10.1149/1.1836587
10.1149/1.1836587 · 1996 · External reference
Unresolved reference
External reference
Unresolved reference
External reference
10.1143/jjap.35.1464
10.1143/jjap.35.1464 · 1996 · External reference
10.1557/proc-73-251
10.1557/proc-73-251 · 1986 · External reference
10.1016/0022-3093(88)90030-0
10.1016/0022-3093(88)90030-0 · 1988 · External reference
10.1149/1.2221224
10.1149/1.2221224 · 1992 · External reference
Unresolved reference
External reference
10.1143/jjap.36.267
10.1143/jjap.36.267 · 1997 · External reference
10.1149/1.1836441
10.1149/1.1836441 · 1996 · External reference
10.1143/jjap.35.1588
10.1143/jjap.35.1588 · 1996 · External reference
10.1143/jjap.35.1583
10.1143/jjap.35.1583 · 1996 · External reference
10.1143/jjap.35.1579
10.1143/jjap.35.1579 · 1996 · External reference
10.1143/jjap.35.1468
10.1143/jjap.35.1468 · 1996 · External reference
10.1143/jjap.26.660
10.1143/jjap.26.660 · 1987 · External reference
10.1109/16.34220
10.1109/16.34220 · 1989 · External reference
10.1143/jjap.29.1789
10.1143/jjap.29.1789 · 1990 · External reference
10.1063/1.110579
10.1063/1.110579 · 1993 · External reference
10.1149/1.2221134
10.1149/1.2221134 · 1993 · External reference
10.1149/1.2054974
10.1149/1.2054974 · 1994 · External reference
Unresolved reference
External reference
10.1007/bf02659727
10.1007/bf02659727 · 1995 · External reference
Unresolved reference
External reference
10.1063/1.107163
10.1063/1.107163 · 1992 · External reference
10.1063/1.108939
10.1063/1.108939 · 1993 · External reference
10.1557/proc-381-45
10.1557/proc-381-45 · 1995 · External reference
10.1557/proc-381-249
10.1557/proc-381-249 · 1995 · External reference
10.1116/1.578295
10.1116/1.578295 · 1993 · External reference
10.1557/proc-381-105
10.1557/proc-381-105 · 1995 · External reference
10.1109/vmic.1990.127863
10.1109/vmic.1990.127863 · External reference
Unresolved reference
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Unresolved reference
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10.1109/vlsit.1995.520858
10.1109/vlsit.1995.520858 · External reference
Unresolved reference
External reference
10.1109/vlsit.1995.520857
10.1109/vlsit.1995.520857 · External reference
Unresolved reference
External reference
10.1016/0022-3093(95)00110-7
10.1016/0022-3093(95)00110-7 · 1995 · External reference
Unresolved reference
External reference
Unresolved reference
External reference
10.7567/ssdm.1995.s-i-6-4
10.7567/ssdm.1995.s-i-6-4 · External reference
Unresolved reference
External reference
10.1557/proc-381-59
10.1557/proc-381-59 · 1995 · External reference
Unresolved reference
External reference
10.1557/proc-381-3
10.1557/proc-381-3 · 1995 · External reference
10.1149/1.2086914
10.1149/1.2086914 · 1990 · External reference
Unresolved reference
External reference
10.1016/0169-4332(91)90364-p
10.1016/0169-4332(91)90364-p · External reference
10.1109/55.225593
10.1109/55.225593 · 1993 · External reference
10.1109/16.277383
10.1109/16.277383 · 1994 · External reference
10.1109/55.388719
10.1109/55.388719 · 1995 · External reference
10.1109/55.468271
10.1109/55.468271 · 1995 · External reference
10.1109/16.370064
10.1109/16.370064 · 1995 · External reference
10.1109/16.469397
10.1109/16.469397 · 1995 · External reference
10.1109/16.223705
10.1109/16.223705 · 1993 · External reference
10.1109/16.277381
10.1109/16.277381 · 1994 · External reference
10.1557/proc-381-79
10.1557/proc-381-79 · 1995 · External reference
10.1149/1.2129379
10.1149/1.2129379 · 1980 · External reference
10.1149/1.2119561
10.1149/1.2119561 · 1983 · External reference
10.1149/1.2069315
10.1149/1.2069315 · 1992 · External reference
10.1149/1.2113853
10.1149/1.2113853 · 1985 · External reference
10.1116/1.586424
10.1116/1.586424 · 1992 · External reference
10.1116/1.578082
10.1116/1.578082 · 1992 · External reference
Unresolved reference
External reference
10.1109/vmic.1991.153052
10.1109/vmic.1991.153052 · External reference
10.1109/vmic.1988.14217
10.1109/vmic.1988.14217 · External reference
Unresolved reference
External reference
10.1109/vmic.1991.153030
10.1109/vmic.1991.153030 · External reference
Unresolved reference
External reference
10.1109/vmic.1991.153031
10.1109/vmic.1991.153031 · External reference
Unresolved reference
External reference
Unresolved reference
External reference
10.7567/ssdm.1992.a-4-5
10.7567/ssdm.1992.a-4-5 · External reference
Unresolved reference
External reference
10.1109/55.215134
10.1109/55.215134 · 1993 · External reference
10.1109/vlsit.1994.324369
10.1109/vlsit.1994.324369 · External reference
10.1149/1.2059241
10.1149/1.2059241 · 1994 · External reference
10.1109/vlsit.1995.520843
10.1109/vlsit.1995.520843 · External reference
10.1109/vlsit.1995.520845
10.1109/vlsit.1995.520845 · External reference
Unresolved reference
External reference
10.7567/ssdm.1991.s-d-9
10.7567/ssdm.1991.s-d-9 · External reference
10.1143/jjap.27.1172
10.1143/jjap.27.1172 · 1988 · External reference
10.1016/0040-6090(94)90188-0
10.1016/0040-6090(94)90188-0 · 1994 · External reference
Unresolved reference
External reference
10.1117/12.47296
10.1117/12.47296 · External reference
