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References from Shallow junction doping technologies for ULSI. Local targets link to admitted publications; unresolved targets remain external evidence.
Unresolved reference
1994 · External reference
10.1116/1.587505
10.1116/1.587505 · 1994 · External reference
Unresolved reference
1993 · External reference
Unresolved reference
1995 · External reference
Unresolved reference
1993 · External reference
Unresolved reference
1994 · External reference
Unresolved reference
1997 · External reference
Unresolved reference
1997 · External reference
Unresolved reference
1997 · External reference
Physics of Semiconductor Devices
1981 · External reference
Unresolved reference
1996 · External reference
10.1016/0038-1101(74)90145-2
10.1016/0038-1101(74)90145-2 · 1974 · External reference
10.1109/t-ed.1986.22737
10.1109/t-ed.1986.22737 · 1986 · External reference
10.1109/16.249429
10.1109/16.249429 · 1993 · External reference
Unresolved reference
1996 · External reference
Unresolved reference
1980 · External reference
10.1109/16.324605
10.1109/16.324605 · 1994 · External reference
10.1016/b978-0-12-234118-2.50005-x
10.1016/b978-0-12-234118-2.50005-x · 1989 · External reference
Unresolved reference
1997 · External reference
10.1109/t-ed.1987.22956
10.1109/t-ed.1987.22956 · 1987 · External reference
10.1016/b978-0-12-234118-2.50007-3
10.1016/b978-0-12-234118-2.50007-3 · 1989 · External reference
10.1109/edl.1985.26226
10.1109/edl.1985.26226 · 1985 · External reference
10.1109/t-ed.1985.21981
10.1109/t-ed.1985.21981 · 1985 · External reference
Unresolved reference
1992 · External reference
10.1109/t-ed.1983.21207
10.1109/t-ed.1983.21207 · 1983 · External reference
10.1016/0038-1101(76)90019-8
10.1016/0038-1101(76)90019-8 · 1976 · External reference
10.1116/1.588454
10.1116/1.588454 · 1996 · External reference
Unresolved reference
1996 · External reference
10.1109/16.464413
10.1109/16.464413 · 1995 · External reference
Unresolved reference
1996 · External reference
Unresolved reference
1996 · External reference
Unresolved reference
1996 · External reference
10.1109/55.289472
10.1109/55.289472 · 1994 · External reference
Unresolved reference
1996 · External reference
Unresolved reference
1996 · External reference
Unresolved reference
1997 · External reference
Unresolved reference
1997 · External reference
Unresolved reference
1985 · External reference
10.1063/1.365193
10.1063/1.365193 · 1997 · External reference
Unresolved reference
External reference
10.1016/0168-583x(95)00711-3
10.1016/0168-583x(95)00711-3 · 1995 · External reference
10.1109/16.141226
10.1109/16.141226 · 1992 · External reference
Unresolved reference
1995 · External reference
Unresolved reference
1997 · External reference
Unresolved reference
1997 · External reference
Unresolved reference
1997 · External reference
10.1007/bf00618760
10.1007/bf00618760 · 1988 · External reference
10.1080/00337577008235042
10.1080/00337577008235042 · 1970 · External reference
10.1016/0920-2307(91)90007-a
10.1016/0920-2307(91)90007-a · 1991 · External reference
10.1016/s0168-583x(96)00470-3
10.1016/s0168-583x(96)00470-3 · 1996 · External reference
Unresolved reference
1981 · External reference
10.1063/1.114775
10.1063/1.114775 · 1995 · External reference
10.1063/1.361162
10.1063/1.361162 · 1996 · External reference
10.1016/0168-583x(89)90207-3
10.1016/0168-583x(89)90207-3 · 1989 · External reference
10.1063/1.364452
10.1063/1.364452 · 1997 · External reference
10.1063/1.103100
10.1063/1.103100 · 1990 · External reference
10.1016/0168-583x(94)00481-1
10.1016/0168-583x(94)00481-1 · 1995 · External reference
10.1063/1.346910
10.1063/1.346910 · 1990 · External reference
10.1103/revmodphys.61.289
10.1103/revmodphys.61.289 · 1989 · External reference
10.1007/bf00619395
10.1007/bf00619395 · 1989 · External reference
Unresolved reference
1997 · External reference
10.1016/s0168-583x(96)00472-7
10.1016/s0168-583x(96)00472-7 · 1996 · External reference
10.1016/0168-583x(95)00703-2
10.1016/0168-583x(95)00703-2 · 1995 · External reference
10.1063/1.112725
10.1063/1.112725 · 1994 · External reference
10.1016/0168-583x(95)00708-3
10.1016/0168-583x(95)00708-3 · 1995 · External reference
Unresolved reference
1993 · External reference
10.1016/s0168-583x(96)00471-5
10.1016/s0168-583x(96)00471-5 · 1996 · External reference
Unresolved reference
1997 · External reference
10.1063/1.364022
10.1063/1.364022 · 1997 · External reference
10.1063/1.117441
10.1063/1.117441 · 1996 · External reference
10.1016/s0168-583x(96)00473-9
10.1016/s0168-583x(96)00473-9 · 1996 · External reference
Unresolved reference
1997 · External reference
10.1063/1.116897
10.1063/1.116897 · 1996 · External reference
Unresolved reference
1997 · External reference
10.1063/1.105146
10.1063/1.105146 · 1991 · External reference
10.1063/1.118454
10.1063/1.118454 · 1997 · External reference
Unresolved reference
1995 · External reference
10.1063/1.365316
10.1063/1.365316 · 1997 · External reference
10.1016/0038-1101(94)00270-p
10.1016/0038-1101(94)00270-p · 1995 · External reference
Unresolved reference
1997 · External reference
Unresolved reference
1993 · External reference
Unresolved reference
1995 · External reference
Unresolved reference
1993 · External reference
Unresolved reference
1997 · External reference
Unresolved reference
1989 · External reference
Unresolved reference
1997 · External reference
Unresolved reference
1997 · External reference
Unresolved reference
1997 · External reference
Unresolved reference
1997 · External reference
Unresolved reference
External reference
Unresolved reference
1997 · External reference
Unresolved reference
1997 · External reference
10.1109/55.723
10.1109/55.723 · 1988 · External reference
Unresolved reference
1994 · External reference
Unresolved reference
1971 · External reference
10.1116/1.588457
10.1116/1.588457 · 1996 · External reference
Unresolved reference
1997 · External reference
10.1063/1.115014
10.1063/1.115014 · 1995 · External reference
10.1149/1.2048717
10.1149/1.2048717 · 1995 · External reference
Unresolved reference
1995 · External reference
10.1063/1.109801
10.1063/1.109801 · 1993 · External reference
10.1063/1.364391
10.1063/1.364391 · 1997 · External reference
Unresolved reference
1997 · External reference
10.1109/16.75156
10.1109/16.75156 · 1991 · External reference
10.1063/1.116277
10.1063/1.116277 · 1996 · External reference
10.1063/1.116640
10.1063/1.116640 · 1996 · External reference
10.1063/1.112857
10.1063/1.112857 · 1994 · External reference
Unresolved reference
1994 · External reference
Unresolved reference
1997 · External reference
Unresolved reference
1996 · External reference
Unresolved reference
1997 · External reference
10.1016/0921-5107(95)01271-0
10.1016/0921-5107(95)01271-0 · 1996 · External reference
Unresolved reference
1993 · External reference
Unresolved reference
1992 · External reference
10.1109/16.57135
10.1109/16.57135 · 1990 · External reference
10.1109/16.62294
10.1109/16.62294 · 1990 · External reference
Unresolved reference
1997 · External reference
10.1149/1.2108364
10.1149/1.2108364 · 1986 · External reference
10.1063/1.96857
10.1063/1.96857 · 1986 · External reference
10.1116/1.587753
10.1116/1.587753 · 1994 · External reference
10.1109/16.556148
10.1109/16.556148 · 1997 · External reference
10.1063/1.358656
10.1063/1.358656 · 1995 · External reference
10.1109/55.596922
10.1109/55.596922 · 1997 · External reference
10.1109/55.568768
10.1109/55.568768 · 1997 · External reference
10.1016/0921-5107(95)01295-8
10.1016/0921-5107(95)01295-8 · 1996 · External reference
10.1016/s0168-583x(96)00583-6
10.1016/s0168-583x(96)00583-6 · 1997 · External reference
10.1143/jjap.36.1364
10.1143/jjap.36.1364 · 1997 · External reference
10.1016/0921-5107(95)01251-6
10.1016/0921-5107(95)01251-6 · 1996 · External reference
10.1063/1.361157
10.1063/1.361157 · 1996 · External reference
10.1063/1.99233
10.1063/1.99233 · 1988 · External reference
Unresolved reference
1992 · External reference
10.1016/0168-583x(91)95282-i
10.1016/0168-583x(91)95282-i · 1991 · External reference
10.1063/1.113204
10.1063/1.113204 · 1995 · External reference
10.1063/1.107051
10.1063/1.107051 · 1992 · External reference
Unresolved reference
1992 · External reference
Unresolved reference
1994 · External reference
10.1007/bf02657525
10.1007/bf02657525 · 1989 · External reference
Unresolved reference
1996 · External reference
10.1063/1.106774
10.1063/1.106774 · 1992 · External reference
10.1063/1.98375
10.1063/1.98375 · 1987 · External reference
10.1016/0168-583x(95)01243-5
10.1016/0168-583x(95)01243-5 · 1996 · External reference
10.1063/1.110367
10.1063/1.110367 · 1993 · External reference
10.1016/s0168-583x(96)00525-3
10.1016/s0168-583x(96)00525-3 · 1996 · External reference
10.1063/1.119150
10.1063/1.119150 · 1997 · External reference
Unresolved reference
1995 · External reference
10.1116/1.586355
10.1116/1.586355 · 1992 · External reference
10.1109/55.225595
10.1109/55.225595 · 1993 · External reference
10.1109/55.484119
10.1109/55.484119 · 1996 · External reference
10.1143/jjap.36.1341
10.1143/jjap.36.1341 · 1997 · External reference
Unresolved reference
1997 · External reference
10.1109/55.556100
10.1109/55.556100 · 1997 · External reference
Unresolved reference
1997 · External reference
10.1109/55.192816
10.1109/55.192816 · 1992 · External reference
Unresolved reference
1995 · External reference
10.1116/1.582708
10.1116/1.582708 · 1983 · External reference
10.1109/edl.1986.26463
10.1109/edl.1986.26463 · 1986 · External reference
Unresolved reference
1996 · External reference
Unresolved reference
1986 · External reference
10.1063/1.339055
10.1063/1.339055 · 1987 · External reference
10.1063/1.100299
10.1063/1.100299 · 1988 · External reference
10.1063/1.100318
10.1063/1.100318 · 1988 · External reference
10.1109/16.543022
10.1109/16.543022 · 1996 · External reference
10.1063/1.114345
10.1063/1.114345 · 1995 · External reference
10.1063/1.118645
10.1063/1.118645 · 1997 · External reference
10.1016/0168-583x(91)96303-3
10.1016/0168-583x(91)96303-3 · 1988 · External reference
10.1109/55.286690
10.1109/55.286690 · 1994 · External reference
Unresolved reference
1996 · External reference
Unresolved reference
1994 · External reference
Unresolved reference
1995 · External reference
10.1557/s0883769400035727
10.1557/s0883769400035727 · 1996 · External reference
Unresolved reference
1996 · External reference
Unresolved reference
1996 · External reference
Unresolved reference
1997 · External reference
10.1143/jjap.35.1027
10.1143/jjap.35.1027 · 1996 · External reference
10.1016/s0927-796x(96)00194-5 · 1996 · Admitted local publication
10.1116/1.587768
10.1116/1.587768 · 1994 · External reference
Unresolved reference
1993 · External reference
10.1109/16.556147
10.1109/16.556147 · 1997 · External reference
10.1063/1.344172
10.1063/1.344172 · 1989 · External reference
10.1063/1.348600
10.1063/1.348600 · 1991 · External reference
Unresolved reference
1970 · External reference
Oxide Charging Damage in Integrated Circuit Processing Investigated with a Coupled Plasma/IC Device Model
1996 · External reference
10.1109/27.402334
10.1109/27.402334 · 1995 · External reference
10.1109/27.533128
10.1109/27.533128 · 1996 · External reference
10.1016/0168-583x(91)96300-a
10.1016/0168-583x(91)96300-a · 1991 · External reference
10.1116/1.589007
10.1116/1.589007 · 1996 · External reference
10.1116/1.587362
10.1116/1.587362 · 1994 · External reference
Unresolved reference
1995 · External reference
Unresolved reference
1997 · External reference
10.1116/1.587336
10.1116/1.587336 · 1994 · External reference
10.1109/27.557484
10.1109/27.557484 · 1997 · External reference
10.1088/0963-0252/1/1/001
10.1088/0963-0252/1/1/001 · 1992 · External reference
Unresolved reference
1997 · External reference
10.1116/1.587337
10.1116/1.587337 · 1994 · External reference
Unresolved reference
1970 · External reference
Unresolved reference
1997 · External reference
Unresolved reference
1997 · External reference
Unresolved reference
1997 · External reference
Ultra-Shallow Junction Fabrication using Plasma Immersion Ion Implantation and Epitaxial CoSi2 as a Dopant Source
1996 · External reference
Unresolved reference
1996 · External reference
10.1116/1.588482
10.1116/1.588482 · 1996 · External reference
10.1109/55.244712
10.1109/55.244712 · 1993 · External reference
10.1063/1.106392
10.1063/1.106392 · 1991 · External reference
10.1007/bf02666628
10.1007/bf02666628 · 1996 · External reference
10.1116/1.587335
10.1116/1.587335 · 1994 · External reference
10.1116/1.579418
10.1116/1.579418 · 1995 · External reference
10.1109/16.52441
10.1109/16.52441 · 1990 · External reference
10.1143/jjap.36.4935
10.1143/jjap.36.4935 · 1997 · External reference
10.1088/0963-0252/6/1/012
10.1088/0963-0252/6/1/012 · 1997 · External reference
10.1016/0257-8972(96)02881-2
10.1016/0257-8972(96)02881-2 · 1996 · External reference
Unresolved reference
1997 · External reference
10.1143/jjap.33.654
10.1143/jjap.33.654 · 1994 · External reference
Unresolved reference
1997 · External reference
Unresolved reference
1997 · External reference
Unresolved reference
1997 · External reference
Unresolved reference
1993 · External reference
10.1116/1.587334
10.1116/1.587334 · 1994 · External reference
10.1007/bf02670923
10.1007/bf02670923 · 1992 · External reference
Unresolved reference
1997 · External reference
Unresolved reference
1984 · External reference
10.1109/edl.1985.26129
10.1109/edl.1985.26129 · 1985 · External reference
Unresolved reference
1984 · External reference
10.1109/43.3150
10.1109/43.3150 · 1988 · External reference
10.1109/55.363214
10.1109/55.363214 · 1995 · External reference
10.1063/1.102735
10.1063/1.102735 · 1990 · External reference
10.1063/1.103065
10.1063/1.103065 · 1990 · External reference
Unresolved reference
1991 · External reference
10.1063/1.107793
10.1063/1.107793 · 1992 · External reference
10.1007/bf00331223
10.1007/bf00331223 · 1993 · External reference
Unresolved reference
1994 · External reference
Unresolved reference
1988 · External reference
Unresolved reference
1989 · External reference
10.1143/jjap.32.l967
10.1143/jjap.32.l967 · 1993 · External reference
10.1143/jjap.31.l659
10.1143/jjap.31.l659 · 1992 · External reference
10.1116/1.587135
10.1116/1.587135 · 1994 · External reference
Unresolved reference
1994 · External reference
Unresolved reference
1997 · External reference
10.1063/1.115135
10.1063/1.115135 · 1995 · External reference
10.1063/1.339747
10.1063/1.339747 · 1987 · External reference
10.1063/1.92572
10.1063/1.92572 · 1981 · External reference
10.1007/bf00617938
10.1007/bf00617938 · 1988 · External reference
10.1016/0017-9310(96)00043-9
10.1016/0017-9310(96)00043-9 · 1996 · External reference
10.1016/0169-4332(93)90512-a
10.1016/0169-4332(93)90512-a · 1993 · External reference
10.1016/0169-4332(93)90032-7
10.1016/0169-4332(93)90032-7 · 1993 · External reference
Unresolved reference
1994 · External reference
10.1063/1.115844
10.1063/1.115844 · 1996 · External reference
Unresolved reference
1996 · External reference
10.1109/55.116961
10.1109/55.116961 · 1991 · External reference
Unresolved reference
1987 · External reference
Unresolved reference
1989 · External reference
10.1016/0169-4332(89)90933-1
10.1016/0169-4332(89)90933-1 · 1989 · External reference
10.1063/1.344553
10.1063/1.344553 · 1990 · External reference
10.1109/55.116961
10.1109/55.116961 · 1991 · External reference
Unresolved reference
1970 · External reference
10.1063/1.100362
10.1063/1.100362 · 1988 · External reference
Unresolved reference
1997 · External reference
Unresolved reference
1986 · External reference
10.1016/0167-9317(93)90210-v
10.1016/0167-9317(93)90210-v · 1993 · External reference
Unresolved reference
1992 · External reference
Unresolved reference
1993 · External reference
10.1063/1.116432
10.1063/1.116432 · 1996 · External reference
10.1063/1.112301
10.1063/1.112301 · 1994 · External reference
10.1063/1.360271
10.1063/1.360271 · 1995 · External reference
10.1063/1.115322
10.1063/1.115322 · 1995 · External reference
Unresolved reference
1989 · External reference
10.1109/55.537075
10.1109/55.537075 · 1996 · External reference
Unresolved reference
External reference
10.1109/55.17838
10.1109/55.17838 · 1988 · External reference
10.1109/edl.1986.26429
10.1109/edl.1986.26429 · 1986 · External reference
10.1109/55.31740
10.1109/55.31740 · 1989 · External reference
10.1149/1.2056208
10.1149/1.2056208 · 1993 · External reference
10.1149/1.2055096
10.1149/1.2055096 · 1994 · External reference
10.1149/1.2054928
10.1149/1.2054928 · 1994 · External reference
Unresolved reference
1995 · External reference
10.1063/1.103180
10.1063/1.103180 · 1990 · External reference
10.1109/55.46948
10.1109/55.46948 · 1990 · External reference
10.1143/jjap.32.4404
10.1143/jjap.32.4404 · 1993 · External reference
10.1109/16.155880
10.1109/16.155880 · 1992 · External reference
10.1063/1.110993
10.1063/1.110993 · 1994 · External reference
Unresolved reference
1994 · External reference
10.1109/16.368036
10.1109/16.368036 · 1995 · External reference
10.1109/16.535319
10.1109/16.535319 · 1996 · External reference
Unresolved reference
131996 · External reference
Unresolved reference
1996 · External reference
Unresolved reference
1992 · External reference
10.1143/jjap.33.4833
10.1143/jjap.33.4833 · 1994 · External reference
10.1109/16.199356
10.1109/16.199356 · 1993 · External reference
10.1143/jjap.31.4567
10.1143/jjap.31.4567 · 1992 · External reference
10.1109/27.553205
10.1109/27.553205 · 1997 · External reference
10.1063/1.355782
10.1063/1.355782 · 1994 · External reference
Unresolved reference
1997 · External reference
Unresolved reference
1997 · External reference
Unresolved reference
1997 · External reference
Unresolved reference
1997 · External reference
Unresolved reference
1996 · External reference
Unresolved reference
1997 · External reference
Unresolved reference
1997 · External reference
10.1143/jjap.35.1450
10.1143/jjap.35.1450 · 1996 · External reference
