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References from Sidewall surface chemistry in directional etching processes. Local targets link to admitted publications; unresolved targets remain external evidence.
Unresolved reference
External reference
10.1016/s0039-6028(97)00304-x
10.1016/s0039-6028(97)00304-x · 1997 · External reference
10.1116/1.578877
10.1116/1.578877 · 1994 · External reference
10.1063/1.326355
10.1063/1.326355 · 1979 · External reference
10.1149/1.2086048
10.1149/1.2086048 · 1991 · External reference
10.1116/1.585451
10.1116/1.585451 · 1991 · External reference
10.1063/1.99382
10.1063/1.99382 · 1988 · External reference
10.1116/1.577364
10.1116/1.577364 · 1991 · External reference
10.1116/1.590104
10.1116/1.590104 · 1998 · External reference
10.7567/ssdm.1986.a-6-1
10.7567/ssdm.1986.a-6-1 · External reference
10.1149/1.2115993
10.1149/1.2115993 · 1984 · External reference
10.1016/0167-5729(92)90009-z
10.1016/0167-5729(92)90009-z · 1992 · External reference
10.1116/1.576224
10.1116/1.576224 · 1989 · External reference
10.1016/0038-1101(87)90038-4
10.1016/0038-1101(87)90038-4 · 1987 · External reference
Unresolved reference
External reference
10.1143/jjap.27.95
10.1143/jjap.27.95 · 1988 · External reference
Unresolved reference
External reference
10.1149/1.2100301
10.1149/1.2100301 · 1987 · External reference
10.1149/1.2096209
10.1149/1.2096209 · 1988 · External reference
Unresolved reference
External reference
10.1116/1.583955
10.1116/1.583955 · 1987 · External reference
10.1149/1.2133542
10.1149/1.2133542 · 1977 · External reference
10.1088/0960-1317/6/1/002
10.1088/0960-1317/6/1/002 · 1996 · External reference
10.1116/1.579658
10.1116/1.579658 · 1995 · External reference
Unresolved reference
External reference
10.1116/1.584896
10.1116/1.584896 · 1990 · External reference
10.1116/1.588559
10.1116/1.588559 · 1996 · External reference
10.1143/jjap.36.2482
10.1143/jjap.36.2482 · 1997 · External reference
10.1143/jjap.36.l518
10.1143/jjap.36.l518 · 1997 · External reference
10.1116/1.576832
10.1116/1.576832 · 1990 · External reference
10.1063/1.103609
10.1063/1.103609 · 1990 · External reference
10.1116/1.578458
10.1116/1.578458 · 1993 · External reference
10.1149/1.2085804
10.1149/1.2085804 · 1991 · External reference
10.1116/1.583203
10.1116/1.583203 · 1985 · External reference
10.1116/1.589258
10.1116/1.589258 · 1997 · External reference
10.1103/physrevlett.79.845
10.1103/physrevlett.79.845 · 1997 · External reference
10.1143/jjap.30.3319
10.1143/jjap.30.3319 · 1991 · External reference
10.1016/0039-6028(81)90106-0
10.1016/0039-6028(81)90106-0 · 1981 · External reference
10.1016/0168-583x(86)90097-2
10.1016/0168-583x(86)90097-2 · 1986 · External reference
10.1116/1.583506
10.1116/1.583506 · 1986 · External reference
Unresolved reference
External reference
10.1149/1.2124348
10.1149/1.2124348 · 1982 · External reference
10.1116/1.571823
10.1116/1.571823 · 1982 · External reference
10.1116/1.572601
10.1116/1.572601 · 1984 · External reference
10.1116/1.582997
10.1116/1.582997 · 1985 · External reference
10.1063/1.345663
10.1063/1.345663 · 1990 · External reference
10.1116/1.587115
10.1116/1.587115 · 1994 · External reference
10.1149/1.2059238
10.1149/1.2059238 · 1994 · External reference
10.1557/proc-38-189
10.1557/proc-38-189 · 1985 · External reference
10.1149/1.2119953
10.1149/1.2119953 · 1983 · External reference
10.1143/jjap.19.l405
10.1143/jjap.19.l405 · 1980 · External reference
10.1116/1.585687
10.1116/1.585687 · 1991 · External reference
10.1016/0038-1101(91)90207-f
10.1016/0038-1101(91)90207-f · 1991 · External reference
10.1016/0038-1101(75)90184-7
10.1016/0038-1101(75)90184-7 · 1975 · External reference
10.1149/1.2123494
10.1149/1.2123494 · 1982 · External reference
10.1143/jjap.31.405
10.1143/jjap.31.405 · 1992 · External reference
10.7567/ssdm.1990.c-3-2
10.7567/ssdm.1990.c-3-2 · External reference
10.1143/jjap.33.991
10.1143/jjap.33.991 · 1994 · External reference
10.1063/1.347673
10.1063/1.347673 · 1991 · External reference
10.1116/1.590064
10.1116/1.590064 · 1998 · External reference
10.1149/1.2100658
10.1149/1.2100658 · 1987 · External reference
10.1002/sia.740080604
10.1002/sia.740080604 · 1986 · External reference
10.1016/0167-9317(86)90067-5
10.1016/0167-9317(86)90067-5 · 1986 · External reference
10.1116/1.584533
10.1116/1.584533 · 1989 · External reference
10.1143/jjap.29.l559
10.1143/jjap.29.l559 · External reference
10.1116/1.589383
10.1116/1.589383 · 1997 · External reference
10.1116/1.584776
10.1116/1.584776 · 1989 · External reference
10.1016/0378-5963(79)90044-8
10.1016/0378-5963(79)90044-8 · 1978 · External reference
10.1063/1.341672
10.1063/1.341672 · 1988 · External reference
10.1063/1.356285
10.1063/1.356285 · 1994 · External reference
10.1116/1.588355
10.1116/1.588355 · 1995 · External reference
10.1116/1.588758
10.1116/1.588758 · 1996 · External reference
10.1116/1.588783
10.1116/1.588783 · 1996 · External reference
10.1116/1.589259
10.1116/1.589259 · 1997 · External reference
10.1149/1.1837690
10.1149/1.1837690 · 1997 · External reference
10.1063/1.343823
10.1063/1.343823 · 1989 · External reference
10.1063/1.350241
10.1063/1.350241 · 1991 · External reference
10.1109/16.83725
10.1109/16.83725 · 1991 · External reference
10.1116/1.586084
10.1116/1.586084 · 1992 · External reference
10.1116/1.578846
10.1116/1.578846 · 1994 · External reference
10.1116/1.578859
10.1116/1.578859 · 1994 · External reference
10.1116/1.587831
10.1116/1.587831 · 1995 · External reference
10.1116/1.579841
10.1116/1.579841 · 1995 · External reference
10.1143/jjap.36.4854
10.1143/jjap.36.4854 · 1997 · External reference
10.1116/1.580974
10.1116/1.580974 · 1998 · External reference
10.1116/1.586180
10.1116/1.586180 · 1992 · External reference
10.1063/1.121068
10.1063/1.121068 · 1998 · External reference
