Research graph
References from SiGe field effect transistors. Local targets link to admitted publications; unresolved targets remain external evidence.
10.1007/bf00896611
10.1007/bf00896611 · 1975 · External reference
10.1116/1.572361
10.1116/1.572361 · 1984 · External reference
10.1063/1.94571
10.1063/1.94571 · 1984 · External reference
10.1103/physrevlett.54.2441
10.1103/physrevlett.54.2441 · 1985 · External reference
10.1109/iedm.1985.191091
10.1109/iedm.1985.191091 · External reference
10.1109/edl.1986.26383
10.1109/edl.1986.26383 · 1986 · External reference
10.1109/edl.1986.26309
10.1109/edl.1986.26309 · 1986 · External reference
10.1063/1.107049
10.1063/1.107049 · 1992 · External reference
10.1109/iedm.1995.499327
10.1109/iedm.1995.499327 · External reference
10.1109/iedm.1995.499322
10.1109/iedm.1995.499322 · External reference
10.1109/iedm.1995.499325
10.1109/iedm.1995.499325 · External reference
10.1103/physrevb.34.5621
10.1103/physrevb.34.5621 · 1986 · External reference
10.1016/0022-0248(95)00365-7
10.1016/0022-0248(95)00365-7 · 1995 · External reference
10.1063/1.349451
10.1063/1.349451 · 1991 · External reference
10.1063/1.99055
10.1063/1.99055 · 1988 · External reference
10.1116/1.586204
10.1116/1.586204 · 1992 · External reference
10.1088/0268-1242/12/8/002
10.1088/0268-1242/12/8/002 · 1997 · External reference
10.1103/physrevlett.54.2441
10.1103/physrevlett.54.2441 · 1985 · External reference
10.1063/1.106246
10.1063/1.106246 · 1991 · External reference
10.1063/1.113577
10.1063/1.113577 · 1995 · External reference
10.1103/physrevb.46.7935
10.1103/physrevb.46.7935 · 1992 · External reference
10.1103/physrevlett.66.1362
10.1103/physrevlett.66.1362 · 1991 · External reference
10.1063/1.114265
10.1063/1.114265 · 1995 · External reference
Unresolved reference
External reference
Unresolved reference
External reference
Unresolved reference
External reference
Evolution of the MOS transistor from conception to VLSI
10.1109/5.16328 · 1988 · External reference
Stabilization of silicon surface by thermally grown oxides
10.1002/j.1538-7305.1959.tb03907.x · 1959 · External reference
Unresolved reference
External reference
Unresolved reference
External reference
10.1142/1388
10.1142/1388 · External reference
VLSI: what does the future hold?
1980 · External reference
Electron velocity in Si and GaAs at very high electric fields
10.1063/1.92078 · 1980 · External reference
Unresolved reference
1949 · External reference
Unresolved reference
External reference
10.1109/iedm.1991.235291
10.1109/iedm.1991.235291 · External reference
10.1109/t-ed.1962.14965
10.1109/t-ed.1962.14965 · 1962 · External reference
10.1109/jssc.1978.1051062
10.1109/jssc.1978.1051062 · 1978 · External reference
Unresolved reference
External reference
10.1109/iedm.1979.189528
10.1109/iedm.1979.189528 · External reference
10.1109/iedm.1988.32840
10.1109/iedm.1988.32840 · External reference
Unresolved reference
External reference
10.1109/55.2051
10.1109/55.2051 · 1988 · External reference
10.1016/s0038-1101(97)00031-2
10.1016/s0038-1101(97)00031-2 · 1997 · External reference
10.1063/1.363493
10.1063/1.363493 · 1996 · External reference
10.1109/55.225584
10.1109/55.225584 · 1993 · External reference
10.1109/16.75177
10.1109/16.75177 · 1991 · External reference
10.1063/1.118089
10.1063/1.118089 · 1996 · External reference
Unresolved reference
1974 · External reference
10.1103/physrevlett.64.1943
10.1103/physrevlett.64.1943 · 1990 · External reference
10.1103/physrevlett.74.4963
10.1103/physrevlett.74.4963 · 1995 · External reference
10.1103/physrevlett.76.1675
10.1103/physrevlett.76.1675 · 1996 · External reference
Unresolved reference
External reference
10.1109/iedm.1994.383389
10.1109/iedm.1994.383389 · External reference
10.1063/1.109949
10.1063/1.109949 · 1993 · External reference
10.1063/1.2809545
10.1063/1.2809545 · External reference
10.1063/1.110547
10.1063/1.110547 · 1993 · External reference
10.1063/1.362953
10.1063/1.362953 · 1996 · External reference
10.1063/1.109278
10.1063/1.109278 · 1993 · External reference
10.1109/edl.1986.26383
10.1109/edl.1986.26383 · 1986 · External reference
10.1109/55.75748
10.1109/55.75748 · 1991 · External reference
10.1109/vlsit.1991.706012
10.1109/vlsit.1991.706012 · External reference
10.1109/55.79566
10.1109/55.79566 · 1991 · External reference
10.1109/iedm.1991.235432
10.1109/iedm.1991.235432 · External reference
10.1143/jjap.32.438
10.1143/jjap.32.438 · External reference
10.1109/16.259625
10.1109/16.259625 · 1994 · External reference
10.1109/55.320982
10.1109/55.320982 · 1994 · External reference
10.1109/t-ed.1986.22544
10.1109/t-ed.1986.22544 · 1986 · External reference
10.1109/t-ed.1986.22579
10.1109/t-ed.1986.22579 · 1986 · External reference
10.1049/el:19910882
10.1049/el:19910882 · 1991 · External reference
10.1049/el:19920100
10.1049/el:19920100 · 1992 · External reference
10.1109/55.145036
10.1109/55.145036 · 1992 · External reference
10.1109/55.225569
10.1109/55.225569 · 1993 · External reference
10.1109/iedm.1994.383389
10.1109/iedm.1994.383389 · External reference
10.1109/55.285389
10.1109/55.285389 · 1994 · External reference
10.1016/0921-5107(94)09015-7
10.1016/0921-5107(94)09015-7 · 1995 · External reference
10.1063/1.355894
10.1063/1.355894 · 1994 · External reference
10.1007/bf02652921
10.1007/bf02652921 · 1990 · External reference
10.1063/1.109205
10.1063/1.109205 · 1993 · External reference
10.1109/iedm.1992.307527
10.1109/iedm.1992.307527 · External reference
10.1143/jjap.33.2412
10.1143/jjap.33.2412 · 1994 · External reference
10.1109/55.75707
10.1109/55.75707 · 1991 · External reference
10.1109/55.215149
10.1109/55.215149 · 1993 · External reference
10.1049/el:19950453
10.1049/el:19950453 · 1995 · External reference
10.1016/s0167-9317(96)00088-3
10.1016/s0167-9317(96)00088-3 · 1997 · External reference
10.1063/1.365415
10.1063/1.365415 · 1997 · External reference
10.7567/ssdm.1993.s-i-1-2
10.7567/ssdm.1993.s-i-1-2 · External reference
10.1109/16.506773
10.1109/16.506773 · 1996 · External reference
10.1049/el:19970166
10.1049/el:19970166 · 1997 · External reference
Unresolved reference
External reference
10.1063/1.1713126
10.1063/1.1713126 · 1964 · External reference
10.1063/1.113910
10.1063/1.113910 · 1995 · External reference
10.1063/1.98385
10.1063/1.98385 · 1987 · External reference
10.1063/1.349015
10.1063/1.349015 · 1991 · External reference
10.1063/1.350847
10.1063/1.350847 · 1992 · External reference
10.1143/jjap.33.2419
10.1143/jjap.33.2419 · 1994 · External reference
10.1063/1.114019
10.1063/1.114019 · 1995 · External reference
10.1063/1.115281
10.1063/1.115281 · 1995 · External reference
10.1063/1.342697
10.1063/1.342697 · 1989 · External reference
The recipe calls for alternative immersion in NH4OH, The recipe calls for alternative immersion in NH4OH and H2SO4 solutions
1970 · External reference
10.1149/1.2044161
10.1149/1.2044161 · 1995 · External reference
10.1016/0038-1101(66)90068-2
10.1016/0038-1101(66)90068-2 · 1996 · External reference
10.1109/iedm.1998.746455
10.1109/iedm.1998.746455 · External reference
