Research graph
References from Design, optimization and fabrication of surface micromachined pressure sensors. Local targets link to admitted publications; unresolved targets remain external evidence.
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10.1109/proc.1982.12331
10.1109/proc.1982.12331 · External reference
10.1063/1.1931164
10.1063/1.1931164 · External reference
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1979 · External reference
10.1016/0250-6874(86)80052-x
10.1016/0250-6874(86)80052-x · External reference
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1987 · External reference
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1987 · External reference
10.1109/iedm.1984.190686
10.1109/iedm.1984.190686 · External reference
10.1109/sensor.1991.148834
10.1109/sensor.1991.148834 · External reference
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1992 · External reference
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1995 · External reference
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1996 · External reference
10.1109/t-ed.1978.19249
10.1109/t-ed.1978.19249 · External reference
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1987 · External reference
10.1103/physrev.94.42
10.1103/physrev.94.42 · External reference
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