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References from Si-to-Si fusion bonded touch mode capacitive pressure sensors. Local targets link to admitted publications; unresolved targets remain external evidence.
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10.1016/0924-4247(90)87074-s
10.1016/0924-4247(90)87074-s · External reference
10.1016/0924-4247(91)87092-h
10.1016/0924-4247(91)87092-h · External reference
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1992 · External reference
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1997 · External reference
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10.31438/trf.hh1994.30
10.31438/trf.hh1994.30 · External reference
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