Research graph
References from Electrochemical etch stop engineering for bulk micromachining. Local targets link to admitted publications; unresolved targets remain external evidence.
10.1109/proc.1982.12331
10.1109/proc.1982.12331 · External reference
Unresolved reference
1995 · External reference
10.1149/1.1837773
10.1149/1.1837773 · External reference
10.1109/t-ed.1978.19250
10.1109/t-ed.1978.19250 · External reference
10.1063/1.1657233
10.1063/1.1657233 · External reference
Unresolved reference
1995 · External reference
10.1149/1.2220767
10.1149/1.2220767 · External reference
Unresolved reference
1990 · External reference
Unresolved reference
1985 · External reference
10.1116/1.576513
10.1116/1.576513 · External reference
Unresolved reference
1995 · External reference
Unresolved reference
1990 · External reference
10.1088/0960-1317/7/3/016
10.1088/0960-1317/7/3/016 · External reference
Unresolved reference
1967 · External reference
Unresolved reference
1975 · External reference
Unresolved reference
1988 · External reference
10.1146/annurev.ms.09.080179.002105
10.1146/annurev.ms.09.080179.002105 · External reference
Unresolved reference
1993 · External reference
Unresolved reference
1992 · External reference
Unresolved reference
External reference
Unresolved reference
1990 · External reference
10.1109/sensor.1995.717136
10.1109/sensor.1995.717136 · External reference
Unresolved reference
1982 · External reference
Unresolved reference
1990 · External reference
Unresolved reference
1990 · External reference
Unresolved reference
1993 · External reference
Unresolved reference
1992 · External reference
Unresolved reference
1995 · External reference
Unresolved reference
External reference
Unresolved reference
1993 · External reference
Unresolved reference
1995 · External reference
10.1002/j.1538-7305.1970.tb01783.x
10.1002/j.1538-7305.1970.tb01783.x · External reference
Unresolved reference
1988 · External reference
Unresolved reference
1994 · External reference
Unresolved reference
1990 · External reference
Unresolved reference
1989 · External reference
Unresolved reference
1991 · External reference
Unresolved reference
1993 · External reference
Unresolved reference
1993 · External reference
10.1088/0960-1317/3/3/014
10.1088/0960-1317/3/3/014 · 1993 · External reference
Unresolved reference
1989 · External reference
10.1149/1.2134373
10.1149/1.2134373 · 1975 · External reference
10.1149/1.2131568
10.1149/1.2131568 · 1990 · External reference
Unresolved reference
External reference
Unresolved reference
1990 · External reference
Unresolved reference
1998 · External reference
Unresolved reference
1996 · External reference
10.1109/84.311561
10.1109/84.311561 · 1994 · External reference
Unresolved reference
1996 · External reference
