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References from Measuring the Metrology Gap – Three-Dimensional Metrology at the Mesoscopic Level. Local targets link to admitted publications; unresolved targets remain external evidence.
10.1088/0026-1394/31/4/006
10.1088/0026-1394/31/4/006 · 1994 · External reference
10.1007/s00542-001-0156-4
10.1007/s00542-001-0156-4 · 2002 · External reference
10.1016/s0007-8506(07)62141-6
10.1016/s0007-8506(07)62141-6 · 2001 · External reference
Unresolved reference
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Transferring microsystems technology through the commercial markets
2003 · External reference
10.1061/40690(2003)17
10.1061/40690(2003)17 · External reference
10.1016/s0007-8506(07)63451-9
10.1016/s0007-8506(07)63451-9 · 2000 · External reference
10.1016/s0007-8506(07)63216-8
10.1016/s0007-8506(07)63216-8 · 1999 · External reference
10.1016/s0007-8506(07)63107-2
10.1016/s0007-8506(07)63107-2 · 1996 · External reference
10.1016/s0007-8506(07)62871-6
10.1016/s0007-8506(07)62871-6 · 1998 · External reference
