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References from Molecular Glass Resists Based on 9,9′-Spirobifluorene Derivatives: Pendant Effect and Comprehensive Evaluation in Extreme Ultraviolet Lithography. Local targets link to admitted publications; unresolved targets remain external evidence.
10.1117/3.821000
10.1117/3.821000 · 2010 · External reference
10.1109/jeds.2013.2271582
10.1109/jeds.2013.2271582 · External reference
10.1039/c7cs00080d
10.1039/c7cs00080d · External reference
Unresolved reference
2016 · External reference
10.1117/1.3616067
10.1117/1.3616067 · External reference
10.1117/12.712861
10.1117/12.712861 · External reference
10.1117/12.772763
10.1117/12.772763 · External reference
10.1117/12.712152
10.1117/12.712152 · External reference
10.1021/cm970587p
10.1021/cm970587p · External reference
10.1021/ma061209l
10.1021/ma061209l · External reference
10.7567/jjap.52.076501
10.7567/jjap.52.076501 · External reference
10.1021/la301311m
10.1021/la301311m · External reference
10.1117/12.2218417
10.1117/12.2218417 · External reference
10.1117/1.3116559
10.1117/1.3116559 · External reference
10.1117/12.916624
10.1117/12.916624 · External reference
10.1021/cm052452m
10.1021/cm052452m · External reference
10.1117/12.656559
10.1117/12.656559 · External reference
10.1117/12.656630
10.1117/12.656630 · External reference
10.1002/adma.200800763
10.1002/adma.200800763 · External reference
10.2494/photopolymer.24.9
10.2494/photopolymer.24.9 · External reference
10.2494/photopolymer.21.443
10.2494/photopolymer.21.443 · External reference
10.1021/cm702613n
10.1021/cm702613n · External reference
10.1039/b719108a
10.1039/b719108a · External reference
10.1016/j.mee.2006.01.025
10.1016/j.mee.2006.01.025 · External reference
10.1039/b925403j
10.1039/b925403j · External reference
10.2494/photopolymer.22.73
10.2494/photopolymer.22.73 · External reference
10.2494/photopolymer.23.657
10.2494/photopolymer.23.657 · External reference
10.2494/photopolymer.25.587
10.2494/photopolymer.25.587 · External reference
10.1038/pj.2010.146
10.1038/pj.2010.146 · External reference
10.1117/12.879302
10.1117/12.879302 · External reference
10.1117/12.2011464
10.1117/12.2011464 · External reference
10.1117/1.3280258
10.1117/1.3280258 · External reference
10.1117/12.814426
10.1117/12.814426 · External reference
10.1117/12.773570
10.1117/12.773570 · External reference
10.1002/mame.201700654
10.1002/mame.201700654 · External reference
10.1016/j.mee.2014.11.002
10.1016/j.mee.2014.11.002 · External reference
10.1021/cm9038939
10.1021/cm9038939 · External reference
10.1021/cm802295y
10.1021/cm802295y · External reference
10.1021/cr0501341
10.1021/cr0501341 · External reference
Unresolved reference
2008 · External reference
10.1021/ja3054018
10.1021/ja3054018 · External reference
10.1021/jo011146z
10.1021/jo011146z · External reference
10.1021/jo020397k
10.1021/jo020397k · External reference
10.1039/b805394d
10.1039/b805394d · External reference
10.1039/b821475a
10.1039/b821475a · External reference
10.1002/adfm.200700140
10.1002/adfm.200700140 · External reference
10.1002/lpor.200810061
10.1002/lpor.200810061 · External reference
10.1143/jjap.50.126501
10.1143/jjap.50.126501 · External reference
10.1088/0957-4484/22/37/375302
10.1088/0957-4484/22/37/375302 · External reference
10.1016/j.mee.2015.03.047
10.1016/j.mee.2015.03.047 · External reference
10.1071/ch11242
10.1071/ch11242 · External reference
10.1002/adma.201103107
10.1002/adma.201103107 · External reference
10.1117/12.600540
10.1117/12.600540 · External reference
10.2494/photopolymer.27.645
10.2494/photopolymer.27.645 · External reference
10.1007/s11426-014-5122-y
10.1007/s11426-014-5122-y · External reference
10.1117/12.771779
10.1117/12.771779 · External reference
