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References from Inductively Coupled Plasma Etching in ICl- and IBr-Based Chemistries. Part I: GaAs, GaSb, and AlGaAs. Local targets link to admitted publications; unresolved targets remain external evidence.
Unresolved reference
1985 · External reference
10.1116/1.583273
10.1116/1.583273 · 1985 · External reference
10.1116/1.587515
10.1116/1.587515 · 1994 · External reference
10.1063/1.104664
10.1063/1.104664 · 1991 · External reference
10.1116/1.590565
10.1116/1.590565 · 1999 · External reference
10.1116/1.585449
10.1116/1.585449 · 1991 · External reference
10.1063/1.110985
10.1063/1.110985 · 1994 · External reference
10.1063/1.113359
10.1063/1.113359 · 1995 · External reference
10.1557/proc-421-431
10.1557/proc-421-431 · 1996 · External reference
10.1116/1.580276
10.1116/1.580276 · 1996 · External reference
10.1007/bf03223028
10.1007/bf03223028 · 1996 · External reference
10.1007/s11664-997-0162-0
10.1007/s11664-997-0162-0 · 1997 · External reference
10.1063/1.117077
10.1063/1.117077 · 1996 · External reference
10.1063/1.120463
10.1063/1.120463 · 1997 · External reference
10.1007/s11664-997-0078-8
10.1007/s11664-997-0078-8 · 1997 · External reference
10.1116/1.589308
10.1116/1.589308 · 1997 · External reference
10.1116/1.589260
10.1116/1.589260 · 1997 · External reference
10.1116/1.578319
10.1116/1.578319 · 1993 · External reference
10.1557/proc-300-75
10.1557/proc-300-75 · 1993 · External reference
10.1080/10408439891324202
10.1080/10408439891324202 · 1998 · External reference
