Research graph
References from Inductively Coupled Plasma Etching in ICl- and IBr-Based Chemistries. Part II: InP, InSb, InGaP, and InGaAs. Local targets link to admitted publications; unresolved targets remain external evidence.
10.1063/1.344296
10.1063/1.344296 · 1989 · External reference
10.1016/0038-1098(89)90588-7
10.1016/0038-1098(89)90588-7 · 1989 · External reference
10.1063/1.102739
10.1063/1.102739 · 1990 · External reference
10.1049/el:19930655
10.1049/el:19930655 · 1993 · External reference
10.1063/1.108042
10.1063/1.108042 · 1992 · External reference
10.1116/1.579848
10.1116/1.579848 · 1995 · External reference
10.1063/1.116553
10.1063/1.116553 · 1996 · External reference
10.1149/1.2044313
10.1149/1.2044313 · 1995 · External reference
Unresolved reference
1993 · External reference
10.1063/1.101764
10.1063/1.101764 · 1989 · External reference
10.1116/1.577809
10.1116/1.577809 · 1992 · External reference
10.1116/1.583485
10.1116/1.583485 · 1986 · External reference
10.1149/1.2123600
10.1149/1.2123600 · 1982 · External reference
Unresolved reference
1986 · External reference
10.1063/1.342564
10.1063/1.342564 · 1989 · External reference
10.1016/0022-0248(75)90077-9
10.1016/0022-0248(75)90077-9 · 1975 · External reference
Unresolved reference
1986 · External reference
10.1063/1.340022
10.1063/1.340022 · 1988 · External reference
10.1063/1.336241
10.1063/1.336241 · 1985 · External reference
10.1016/0039-6028(93)90940-l
10.1016/0039-6028(93)90940-l · 1993 · External reference
Unresolved reference
1997 · External reference
Unresolved reference
External reference
Unresolved reference
1989 · External reference
