Research graph
References from An Analytical 1-D Model for Ion Implantation of Any Species into Single-Crystal Silicon Based on Legendre Polynomials. Local targets link to admitted publications; unresolved targets remain external evidence.
10.1109/iedm.1998.746411
10.1109/iedm.1998.746411 · External reference
Unresolved reference
External reference
10.1109/iedm.1996.554082
10.1109/iedm.1996.554082 · External reference
10.1016/0168-583x(95)80137-b
10.1016/0168-583x(95)80137-b · 1995 · External reference
