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References from Optical Diagnostics of the Effect of Oxygen on Bi-Level Contact Etch. Local targets link to admitted publications; unresolved targets remain external evidence.
Unresolved reference
1989 · External reference
10.1116/1.579830
10.1116/1.579830 · 1995 · External reference
10.1116/1.580701
10.1116/1.580701 · 1997 · External reference
10.1063/1.325382
10.1063/1.325382 · 1978 · External reference
10.1063/1.329748
10.1063/1.329748 · 1981 · External reference
10.1366/000370277774463698
10.1366/000370277774463698 · 1977 · External reference
10.1116/1.580283
10.1116/1.580283 · 1996 · External reference
Unresolved reference
1998 · External reference
Unresolved reference
External reference
