Contact and support
Need help, have a question, or want to contact the ResearchHub team?
© 2026 ResearchHub. Built for responsible scholarly connection.
Privacy-aware community infrastructureResearch graph
References from Amorphous boron nitride as a low-k dielectric for next-generation BEOL interconnects. Local targets link to admitted publications; unresolved targets remain external evidence.
10.1109/mm.2017.4241347
10.1109/mm.2017.4241347 · 2017 · External reference
10.1109/jssc.1974.1050511
10.1109/jssc.1974.1050511 · 1974 · External reference
10.1016/s1369-7021(04)00053-7
10.1016/s1369-7021(04)00053-7 · 2004 · External reference
10.1063/1.1567460
10.1063/1.1567460 · 2003 · External reference
10.1116/1.4943049
10.1116/1.4943049 · 2016 · External reference
10.1063/1.4861876
10.1063/1.4861876 · 2014 · External reference
10.1126/science.adk6189
10.1126/science.adk6189 · 2024 · External reference
10.3390/electronics11182914
10.3390/electronics11182914 · 2022 · External reference
10.1016/s1369-7021(06)71387-6
10.1016/s1369-7021(06)71387-6 · 2006 · External reference
10.1038/s44287-025-00233-y
10.1038/s44287-025-00233-y · 2025 · External reference
10.3390/ma3010536
10.3390/ma3010536 · 2010 · External reference
10.1557/jmr.2015.313
10.1557/jmr.2015.313 · 2015 · External reference
10.1149/2.0071501jss
10.1149/2.0071501jss · 2015 · External reference
10.1557/jmr.2013.79
10.1557/jmr.2013.79 · 2013 · External reference
10.1109/tdmr.2009.2033670
10.1109/tdmr.2009.2033670 · 2009 · External reference
10.1149/2.0081501jss
10.1149/2.0081501jss · 2015 · External reference
10.3390/ma5091602
10.3390/ma5091602 · 2012 · External reference
10.1149/2.0091501jss
10.1149/2.0091501jss · 2015 · External reference
10.3390/polym16152230
10.3390/polym16152230 · 2024 · External reference
10.1063/1.2048822
10.1063/1.2048822 · 2005 · External reference
10.1002/adma.201302021
10.1002/adma.201302021 · 2013 · External reference
10.1016/j.jpcs.2007.11.019
10.1016/j.jpcs.2007.11.019 · 2008 · External reference
10.1016/j.porgcoat.2024.108708
10.1016/j.porgcoat.2024.108708 · 2024 · External reference
10.1038/s41586-020-2375-9
10.1038/s41586-020-2375-9 · 2020 · External reference
10.1109/ted.2023.3258403
10.1109/ted.2023.3258403 · 2023 · External reference
10.1186/s40580-025-00486-1
10.1186/s40580-025-00486-1 · 2025 · External reference
10.1109/relphy.2002.996654
10.1109/relphy.2002.996654 · External reference
10.1109/iedm.2002.1175948
10.1109/iedm.2002.1175948 · External reference
10.1109/tdmr.2004.831990
10.1109/tdmr.2004.831990 · 2004 · External reference
10.1109/tdmr.2004.833225
10.1109/tdmr.2004.833225 · 2004 · External reference
10.1016/j.mee.2004.02.094
10.1016/j.mee.2004.02.094 · 2004 · External reference
10.1021/cr9002819
10.1021/cr9002819 · 2010 · External reference
10.1088/2515-7639/ad4c06
10.1088/2515-7639/ad4c06 · 2024 · External reference
10.1002/admt.202200022
10.1002/admt.202200022 · 2022 · External reference
10.1016/j.mee.2007.05.025
10.1016/j.mee.2007.05.025 · 2007 · External reference
10.1016/j.surfcoat.2007.04.096
10.1016/j.surfcoat.2007.04.096 · 2007 · External reference
10.1149/1.1775973
10.1149/1.1775973 · 2004 · External reference
10.5772/intechopen.79494
10.5772/intechopen.79494 · 2018 · External reference
10.3390/ma14092284
10.3390/ma14092284 · 2021 · External reference
10.1116/1.2834562
10.1116/1.2834562 · 2008 · External reference
10.1063/1.4765297
10.1063/1.4765297 · 2013 · External reference
10.1063/1.4891501
10.1063/1.4891501 · 2014 · External reference
10.1016/s0026-2692(02)00075-7
10.1016/s0026-2692(02)00075-7 · 2002 · External reference
10.1016/j.tsf.2004.05.048
10.1016/j.tsf.2004.05.048 · 2004 · External reference
10.1166/jnn.2021.19020
10.1166/jnn.2021.19020 · 2021 · External reference
10.1016/j.tsf.2021.138680
10.1016/j.tsf.2021.138680 · 2021 · External reference
10.1038/s41467-024-48429-4
10.1038/s41467-024-48429-4 · 2024 · External reference
10.1016/s0040-6090(02)00431-5
10.1016/s0040-6090(02)00431-5 · 2002 · External reference
10.1021/acsami.2c18706
10.1021/acsami.2c18706 · 2023 · External reference
10.1088/1361-6528/adb293
10.1088/1361-6528/adb293 · 2025 · External reference
10.1002/adma.202204161
10.1002/adma.202204161 · 2023 · External reference
10.1016/j.tsf.2013.07.001
10.1016/j.tsf.2013.07.001 · 2013 · External reference
10.1088/2515-7639/ad367b
10.1088/2515-7639/ad367b · 2024 · External reference
10.3390/coatings15101138
10.3390/coatings15101138 · 2025 · External reference
10.1109/irps.2009.5173300
10.1109/irps.2009.5173300 · External reference
10.1088/2053-1583/ae2521
10.1088/2053-1583/ae2521 · 2026 · External reference
10.3390/coatings14111412
10.3390/coatings14111412 · 2024 · External reference
10.1109/jeds.2024.3418212
10.1109/jeds.2024.3418212 · 2024 · External reference
10.1143/jjap.42.4489
10.1143/jjap.42.4489 · 2003 · External reference
10.3390/electronics13142779
10.3390/electronics13142779 · 2024 · External reference
10.1002/admt.202500899
10.1002/admt.202500899 · 2025 · External reference
10.1016/j.micromeso.2023.112478
10.1016/j.micromeso.2023.112478 · 2023 · External reference
10.1098/rspa.1909.0021
10.1098/rspa.1909.0021 · 1909 · External reference
10.1016/j.mssp.2018.12.008
10.1016/j.mssp.2018.12.008 · 2019 · External reference
10.1149/07705.0111ecst
10.1149/07705.0111ecst · 2017 · External reference
10.5573/jsts.2025.25.1.102
10.5573/jsts.2025.25.1.102 · 2025 · External reference
10.5104/jiepeng.5.41
10.5104/jiepeng.5.41 · 2012 · External reference
10.1021/acs.jpclett.3c01712
10.1021/acs.jpclett.3c01712 · 2023 · External reference
10.1016/j.surfin.2024.104734
10.1016/j.surfin.2024.104734 · 2024 · External reference
