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References from Deconvolution method for extreme ultraviolet broadband imaging spectrometry using dispersion-matched zone plates. Local targets link to admitted publications; unresolved targets remain external evidence.
10.1088/0022-3727/44/25/253001
10.1088/0022-3727/44/25/253001 · 2011 · External reference
Industrialization of a robust EUV source for high-volume manufacturing and power scaling beyond 250 W
2018 · External reference
10.1088/1361-6595/ab3302
10.1088/1361-6595/ab3302 · 2019 · External reference
10.1063/1.4978290
10.1063/1.4978290 · 2017 · External reference
10.1143/jjap.46.6568
10.1143/jjap.46.6568 · 2007 · External reference
Analysis and control of thermal and structural deformation of projection optics for 22-nm EUV lithography
2012 · External reference
10.1063/5.0073839
10.1063/5.0073839 · 2021 · External reference
10.1117/1.jmm.19.3.033801
10.1117/1.jmm.19.3.033801 · 2020 · External reference
10.1364/ol.496995
10.1364/ol.496995 · 2023 · External reference
10.1364/optica.398022
10.1364/optica.398022 · 2020 · External reference
10.1364/optica.405977
10.1364/optica.405977 · 2021 · External reference
10.1364/josa.51.000405
10.1364/josa.51.000405 · 1961 · External reference
10.1038/s41598-017-09052-0
10.1038/s41598-017-09052-0 · 2017 · External reference
Tapered tilted linear zone plates for focusing hard x-rays
2004 · External reference
10.1107/s1600577518007208
10.1107/s1600577518007208 · 2018 · External reference
10.1364/oe.23.004421
10.1364/oe.23.004421 · 2015 · External reference
10.1063/5.0226426
10.1063/5.0226426 · 2024 · External reference
10.1364/oe.17.019662
10.1364/oe.17.019662 · 2009 · External reference
10.1103/physrevapplied.12.014010
10.1103/physrevapplied.12.014010 · 2019 · External reference
10.1364/ao.45.001102
10.1364/ao.45.001102 · 2006 · External reference
10.1038/s41467-020-15678-y
10.1038/s41467-020-15678-y · 2020 · External reference
Unresolved reference
2023 · External reference
Unresolved reference
2016 · External reference
10.1364/josa.62.000055
10.1364/josa.62.000055 · 1972 · External reference
10.1086/111605
10.1086/111605 · 1974 · External reference
10.1002/cphc.201300831
10.1002/cphc.201300831 · 2014 · External reference
10.1038/s41467-025-56241-x
10.1038/s41467-025-56241-x · 2025 · External reference
10.1088/1742-6596/630/1/012003
10.1088/1742-6596/630/1/012003 · 2015 · External reference
10.1364/josaa.19.001286
10.1364/josaa.19.001286 · 2002 · External reference
10.1088/1361-6595/ad7c7c
10.1088/1361-6595/ad7c7c · 2024 · External reference
10.1063/5.0286647
10.1063/5.0286647 · 2025 · External reference
