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A.E.U. Lees
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X-ray lithography and LIGA at Daresbury — Focus on Micromechanics
1993
X-ray lithography and LIGA at Daresbury — Focus on Micromechanics
1993
Micromechanics: an Overview — Focus on Micromechanics
1993
Micromechanics: an Overview — Focus on Micromechanics
1993
Processes and their Implications for the Design of Micromachined Devices — Focus on Micromechanics
1993
Processes and their Implications for the Design of Micromachined Devices — Focus on Micromechanics
1993
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Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation, lithography, galvanoforming and plastic moulding (LIGA process)
10.1016/0167-9317(86)90004-3 · 1986
Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation, lithography, galvanoforming and plastic moulding (LIGA process)
10.1016/0167-9317(86)90004-3 · 1986
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