Preparation of Silicon Microrobots: An Experiment in Micro/Nanofabrication and Devices

Abstract This paper reports an undergraduate laboratory experiment designed for a course on micro/nanofabrication and devices, in which students fabricate and characterize silicon nanowire–based microrobots using standard micro/nanofabrication techniques. The experiment integrates photolithography, silicon etching, and thin-film deposition to construct ordered silicon nanowire arrays featuring an in situ SiO2 insulating layer and deposited metal films, thereby forming metal–insulator–semiconductor (MIS) junctions capable of enabling light-driven propulsion. By combining top–down microfabrication with bottom–up nanostructure formation, the project introduces students to fundamental concepts in modern micro/nanoengineering, including template-assisted fabrication, structure–property relationships, and microrobot motion analysis. The laboratory instruction combines demonstrations by teaching assistants with hands-on practice by students, extends beyond conventional “cookbook-style” laboratory instruction by emphasizing process optimization, parameter regulation, and experimental data analysis, thereby strengthening students’ understanding of micro/nanodevice fabrication principles and operational mechanisms. Overall, this work provides a modular, reproducible, and pedagogically accessible laboratory framework for incorporating emerging microrobot technologies into undergraduate engineering and applied science curricula.