Abstract
Absorption-based spectroscopy in the mid-infrared (MIR) spectral range (i.e., 2.5-25 μm) is an excellent choice for directly sensing trace gas analytes providing discriminatory molecular information due to inherently specific fundamental vibrational, rovibrational, and rotational transitions. Complimentarily, the miniaturization of optical components has aided the utility of optical sensing techniques in a wide variety of application scenarios that demand compact, portable, easy-to-use, and robust analytical platforms yet providing suitable accuracy, sensitivity, and selectivity. While MIR sensing technologies have clearly benefitted from the development of advanced on-chip light sources such as quantum cascade and interband cascade lasers and equally small MIR detectors, less attention has been paid to the development of modular/tailored waveguide technologies reproducibly and reliably interfacing photons with sample molecules in a compact format. In this context, the first generation of a new type of hollow waveguides gas cells-the so-called substrate-integrated hollow waveguides (iHWG)-with unprecedented compact dimensions published by the research team of Mizaikoff and collaborators has led to a paradigm change in optical transducer technology for gas sensors. Features of iHWGs included an adaptable (i.e., designable) well-defined optical path length via the integration of meandered hollow waveguide structures at virtually any desired dimension and geometry into an otherwise planar substrate, a high degree of robustness, compactness, and cost-effectiveness in fabrication. Moreover, only a few hundred microliters of gas samples are required for analysis, resulting in short sample transient times facilitating a real-time monitoring of gaseous species in virtually any concentration range. In this review, we give an overview of recent advancements and achievements since their introduction eight years ago, focusing on the development of iHWG-based mid-infrared sensor technologies. Highlighted applications ranging from clinical diagnostics to environmental and industrial monitoring scenarios will be contrasted by future trends, challenges, and opportunities for the development of next-generation portable optical gas-sensing platforms that take advantage of a modular and tailorable device design.