Diagnostics of an RF Plasma Flash Evaporation Process Using the Monochromatic Imaging Technique

P. Buchner; H. Schubert; J. Uhlenbusch; M. Weiss

doi:10.1023/a:1007067210996

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Diagnostics of an RF Plasma Flash Evaporation Process Using the Monochromatic Imaging Technique

P. Buchner, H. Schubert, J. Uhlenbusch, M. Weiss

Plasma Chemistry and Plasma Processing2001doi:10.1023/a:1007067210996

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Abstract

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P. Buchner#1 H. Schubert#2 J. Uhlenbusch#3 M. Weiss#4

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10.1088/0963-0252/6/4/015 · 1997

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Diagnostics of an RF Plasma Flash Evaporation Process Using the Monochromatic Imaging Technique

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