A CMOS surface micromachined pressure sensor

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Ching‐Liang Dai, Pei‐Zen Chang

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10.1016/0924-4247(94)00876-j

10.1080/02533839.1997.9741805

10.1080/02533839.1997.9741805 · 1997

10.1016/0924-4247(93)80102-m

10.1016/0924-4247(94)80002-2

10.1088/0960-1317/2/3/020

10.1016/0924-4247(90)87004-3

10.1016/0924-4247(90)87004-3 · 1991

10.1016/0924-4247(94)00878-l

Unresolved referenced work

1980

10.1109/t-ed.1985.22099

Unresolved referenced work

1981

10.1016/0924-4247(94)00877-k

Unresolved referenced work