Resonant and scatterometric grating-based nanophotonic structures for biosensing

Resonant and non-resonant phenomena in grating based photonic structures were investigated as biological and biochemical sensors particularly for water contaminants. Detectivity on the order of 10-6 RIU was found to be possible. Spectroscopic scatterometry in conical mounting at normal incidence was found to offer high sensitivity and it allows specificity in addition to refractive-index-variation measurement.