Abstract
To address the insufficient calibration accuracy of deformation in current strain measurement systems, this study proposes and implements a dual-axis tilt deformation calibration method based on piezoelectric ceramic actuation. This method employs three piezoelectric ceramic actuators to construct a decoupled tilting mechanism, effectively realizing high-precision and controllable tilt output of the deformable component in the X and Y directions, and establishes a quantitative relationship model between the tilt angle and deformation based on the measurement principle of an autocollimator. To verify the performance of the calibration method, a bi-axial high-precision autocollimator is used in the experiment to measure the tilt angles output by the component under different tilting states, and measurement uncertainty analysis is carried out. The experimental results show that the calibration method based on the tilt deformation component exhibits excellent measurement accuracy, with the deviation between the actual tilt angle and the theoretical value being less than 0.05″, and a repeatability error reaching 0.063″. The uncertainty analysis results further confirm the reliability of the proposed calibration method. This study provides a high-precision and traceable technical means and theoretical basis for the accuracy evaluation and calibration of strain measurement systems.