Abstract
In this paper, a small Fabry-Perot (F-P) acceleration sensor based on 45° fiber is proposed and implemented, which aims to realize high precision, high sensitivity and anti-interference vibration detection while realizing miniaturization packaging. Using beryllium bronze material and corrosion process, a micro elastic structure with a side length of 4.5 mm and a thickness of 200 um was designed and prepared as a sensitive element. A F-P interference cavity is constructed by 45° fiber side surface and elastic structure to realize high-precision detection of axial vibration. The experimental results show that the resonance frequency of the sensor is 3325 Hz and the working bandwidth is 0-1200 Hz. At 100 Hz, the axial sensitivity is 24.536 nm/g, the lateral sensitivity is 1.038 nm/g, the cross-axis anti-interference rate is 4.23%, and the linearity is 99.95%. The acceleration resolution is 10.849 mg. The experimental results are highly consistent with the simulation results. The accuracy of the design and the stability of the manufacturing are verified. The acceleration sensor prepared acceleration sensor has the advantages of miniaturization, high sensitivity and high precision, and has practical application value in structural health monitoring, impact event capture, modal testing and so on.