Abstract
In this letter, we propose a Micro-Opto-Electro-Mechanical Systems (MOEMS) accelerometer based on a thin-film lithium niobate (TFLN) platform. By employing a high quality factor (Q = 3.1×10⁵) racetrack resonator, the device achieves a noise-equivalent acceleration (NEA) of 126 μg/Hz1/2 and a bandwidth of 72 Hz with a compact footprint of approximately 2 mm × 1.3 mm, providing technological support for the next generation of high-precision, miniaturized accelerometer devices.