Abstract
To meet the high-precision calibration requirements of optical full-field strain measurement systems for standard deformation inputs, this paper proposes a deformation measurement method for a multifunctional calibration component based on laser interferometric measurement combined with synchronous angle measurement using an autocollimator. The component can generate first-order tilt deformation and second-order bending deformation. For the front surface, a laser interferometer is used to acquire the surface figure distributions in adjacent states, and the tilt variation and bending variation are extracted by surface-figure differencing. In the tilt mode, a plane mirror is mounted on the rear surface, and an autocollimator is used to synchronously measure the rear-surface tilt angle variation. Experimental results show that, under a set tilt variation of 1″, the average tilt measured by the interferometer is 0.878″, while that measured by the autocollimator is 0.870″, indicating good synchronous response between the front and rear surfaces of the calibration component. In the bending mode, the differential surface figure mainly exhibits a 0/90° astigmatism characteristic, with an average PV value of 0.550μm and an average astigmatism coefficient of 0.109, which is consistent with the expected hyperbolic surface figure characteristic. This method can realize quantitative measurement of the tilt and bending deformation modes of the calibration component, providing support for high-precision measurement applications of optical full-field strain measurement systems.