Abstract
Piezo-photoelastic tuning provides a capacitive, carrier-free route to
optical resonance control, making it attractive for data-center
interconnects and energy-efficient photonics. However, piezoelectric
materials that simultaneously provide lead-free composition, CMOS
compatibility, and high piezoelectric coefficients remain elusive. To
address this, we first propose and experimentally demonstrate
AlScN-integrated Si
3
N
4
microring resonators for efficient
piezo-photoelastic tuning. The device employs a planar AlScN-on-Si
3
N
4
stack designed to enhance
stress-optical interaction. Experimental results show a passive loaded
quality factor of 4.7×10
4
and tuning efficiencies of 0.9 and
1.0 pm/V at the drop and through ports, respectively. These results
demonstrate the potential of AlScN-integrated waveguides for enhanced
piezo-photoelastic tuning.