Abstract
Abstract
This paper proposes an auto-fitting algorithm to evaluate modified Butterworth-Van Dyke (mBVD) parameters for surface and bulk acoustic wave (SAW/BAW) resonators effective even for situations where strong spurious responses are overlapped. Deviations of fitted Bode Q, resistance and conductance from the original data are considered in the objective function, and their weights are finely adjusted by the volatility at each frequency point. Namely, the weight sets small when the volatility is large since the original data at the point is unreliable due to inclusion of spurious responses. The fitting software is applied for several SAW/BAW resonators with strong spurious responses, and its effectiveness is demonstrated.