Abstract
An approach to decreasing mismatch-induced stress in a heterostructure by radiation processing during growth from the gas phase is introduced in this paper. Within the framework of the approach with decreasing mismatch-induced stresses, one can find the acceleration of the recombination and diffusion of radiation defects generated during radiation processing. An analytical approach for analyzing mass and heat transfer is also introduced. The approach provides the opportunity to simultaneously take into account spatial and temporal variations of mass transfer parameters. At the same time, the approach allows the nonlinearity of the considered processes to be taken into account.