Abstract
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Gino Cardarelli, Pacifico Marcello Pelagagge, Agostino Granito
Abstract
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Prospects of the automation for ULSI manufacturing
1990
Simulation tool for design and management optimization of automated interbay material handling and storage systems for large Wafer Fab
10.1109/66.350756 · 1995
Performances analyses for intrabay material handling automation in MOS memory production
1993
Factory automation of front-end processing for VLSI fabrication
1988
The future of automation for high volume wafer fabrication and ASIC manufacturing
1986
Automated transport system in IC facility
1990
Top Fabs of 1992
1992
Unresolved referenced work
1990
Material handling automation for wafer fabrication facility
1990
Unresolved referenced work
1993
Confidence 0%
No additional external references are available.