Electrochemical etch stop engineering for bulk micromachining

C.M.A. Ashruf; P.J. French; P.M. Sarro; P.M.M.C. Bressers; J.J. Kelly

doi:10.1016/s0957-4158(98)00017-8

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Electrochemical etch stop engineering for bulk micromachining

C.M.A. Ashruf, P.J. French, P.M. Sarro, P.M.M.C. Bressers, J.J. Kelly

Mechatronics1998doi:10.1016/s0957-4158(98)00017-8

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C.M.A. Ashruf#1 P.J. French#2 P.M. Sarro#3 P.M.M.C. Bressers#4 J.J. Kelly#5

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10.1109/proc.1982.12331

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1995

10.1149/1.1837773

10.1109/t-ed.1978.19250

10.1063/1.1657233

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1995

10.1149/1.2220767

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1990

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1985

10.1116/1.576513

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1995

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1990

10.1088/0960-1317/7/3/016

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Electrochemical etch stop engineering for bulk micromachining

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