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SURFACE ROUGHNESS OF SPUTTERED SILICON. II. MODEL VERIFICATION | ResearchHub

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SURFACE ROUGHNESS OF SPUTTERED SILICON. II. MODEL VERIFICATION

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SURFACE ROUGHNESS OF SPUTTERED SILICON. II. MODEL VERIFICATION

M. Y. Ali, N. P. Hung

Materials and Manufacturing Processes2001doi:10.1081/amp-100107377

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M. Y. Ali#1 N. P. Hung#2

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10.1117/12.396444

10.1117/12.396444

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10.1116/1.590959

10.1116/1.590959 · 1999

10.1063/1.117668

10.1063/1.117668 · 1996

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10.1007/3540105212_7

10.1007/3540105212_7

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